Topography contrast in low-voltage SEM

被引：0
|
作者：
Libinson, AG [1 ]
机构：
[1] Opal Technol Ltd, IL-74103 Nes Ziona, Israel
来源：
ELECTRON MICROSCOPY 1998, VOL 1: GENERAL INTEREST AND INSTRUMENTATION | 1998年
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：475 / 476
页数：2
相关论文
共 50 条
  • [11] DIY adapting SEM for low-voltage TEM imaging
    Antonio, Zecca Piero
    Marina, Protasoni
    Marcella, Reguzzoni
    Mario, Raspanti
    MICROSCOPY RESEARCH AND TECHNIQUE, 2025, 88 (01) : 17 - 25
  • [12] LOW-VOLTAGE SEM INSPECTION OF MICRO ELECTRONIC DEVICES
    SUGIYAMA, N
    IKEDA, S
    UCHIKAWA, Y
    JOURNAL OF ELECTRON MICROSCOPY, 1986, 35 (01): : 9 - 18
  • [13] ACCURACY OF VOLTAGE MEASUREMENT IN LSI-INSPECTION USING THE LOW-VOLTAGE SEM
    SUGIYAMA, N
    MURATA, H
    IKEDA, S
    UCHIKAWA, Y
    JOURNAL OF ELECTRON MICROSCOPY, 1984, 33 (03): : 261 - 262
  • [14] Low voltage contrast with an SEM Transmission Electron Detector
    Grillon, Francois
    MICROCHIMICA ACTA, 2006, 155 (1-2) : 157 - 161
  • [15] THE OBJECTIVE SYSTEM FOR LOW-VOLTAGE SEM WITH A LARGE SCANNING FIELD
    BALASHOV, VN
    ZURAKOVCKY, VM
    SUVORINOV, AV
    SHAKBAZOV, SJ
    IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA, 1993, 57 (08): : 123 - 126
  • [16] LOW-VOLTAGE SEM - PROSPECTS AND LIMITS IN BIOLOGICAL-RESEARCH
    PESCHKE, T
    ACTA HISTOCHEMICA, 1990, : 451 - 452
  • [17] ANALYTICAL LOW-VOLTAGE SEM IN UHV FOR SOLID-SURFACE
    ICHINOKAWA, T
    AMPO, H
    KINOSHITA, S
    JOURNAL DE PHYSIQUE, 1984, 45 (NC-2): : 301 - 306
  • [18] Experimental results using a "low-voltage booster" in a conventional SEM
    Plies, E
    Degel, B
    Hayn, A
    Knell, G
    Neumann, J
    Schiebel, B
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1999, 427 (1-2) : 126 - 130
  • [19] Experimental results using a 'low-voltage booster' in a conventional SEM
    Plies, E.
    Degel, B.
    Hayn, A.
    Knell, G.
    Neumann, J.
    Schiebel, B.
    Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1999, 427 (1-2): : 126 - 130
  • [20] Soft X-Rays and Low-Voltage SEM in Practice
    Stefan Kuypers
    Microchimica Acta, 2002, 138 : 235 - 247
12345