Fabrication of 3D metal/polymer microstructures by site-selective metal coating

被引：28
作者：
Takeyasu, N.
Tanaka, T.
Kawata, S.
机构：
[1] RIKEN, Nanophoton Lab, Wako, Saitama 3510198, Japan
[2] JST, PRESTO, Kawaguchi, Saitama 3220012, Japan
[3] Osaka Univ, Dept Appl Phys, Osaka 5650871, Japan
[4] JST, CREST, Kawaguchi, Saitama 3220012, Japan
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2008年 / 90卷 / 02期
关键词：
Coating techniques - Electroless plating - Micrometers - Photons - Photopolymerization - Photopolymers - Silver;
D O I：
10.1007/s00339-007-4298-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Three-dimensional silver/polymer conjugated microstructures were fabricated by site-selective metal deposition on photopolymer structures in the sub-micrometer scale. Photopolymerizable resins with and without an amide group were independently prepared, and a three-dimensional polymer structure was fabricated with those resins by means of the two-photon-induced photopolymerization technique to confine the photopolymerization to a sub-micrometer volume. Silver was selectively deposited on the surface of the amide-containing polymer parts by electroless plating. This method can provide 3D arbitrary silver/polymer composite microstructures with sub-micrometer resolution.
引用
收藏
页码：205 / 209
页数：5
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