Surface reactions in the chemical vapor deposition of highly transparent and conductive fluorine-doped zinc oxide

被引:0
|
作者
Gordon, RG [1 ]
Liang, HF [1 ]
机构
[1] Harvard Univ, Chem Labs, Cambridge, MA 02138 USA
关键词
D O I
暂无
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
201-PHYS
引用
收藏
页码:U718 / U718
页数:1
相关论文
共 50 条
  • [31] Spray deposition of highly transparent fluorine doped cadmium oxide thin films
    Deokate, R. J.
    Pawar, S. M.
    Moholkar, A. V.
    Sawant, V. S.
    Pawar, C. A.
    Bhosale, C. H.
    Rajpure, K. Y.
    APPLIED SURFACE SCIENCE, 2008, 254 (07) : 2187 - 2195
  • [32] Transparent conductive zinc-oxide-based films grown at low temperature by mist chemical vapor deposition
    Shirahata, Takahiro
    Kawaharamura, Toshiyuki
    Fujita, Shizuo
    Orita, Hiroyuki
    THIN SOLID FILMS, 2015, 597 : 30 - 38
  • [33] Enhanced transparent-conducting fluorine-doped tin oxide films formed by Aerosol-Assisted Chemical Vapour Deposition
    Noor, Nuruzzaman
    Parkin, Ivan P.
    JOURNAL OF MATERIALS CHEMISTRY C, 2013, 1 (05) : 984 - 996
  • [34] HIGHLY CONDUCTIVE AND TRANSPARENT FILMS OF TIN AND FLUORINE DOPED INDIUM OXIDE PRODUCED BY APCVD
    MAYER, B
    THIN SOLID FILMS, 1992, 221 (1-2) : 166 - 182
  • [35] Low Pressure Chemical Vapor Deposition of Aluminum-Doped Zinc Oxide for Transparent Conducting Electrodes
    Kim, Woo-Hee
    Maeng, W. J.
    Kim, Min-Kyu
    Kim, Hyungjun
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2011, 158 (08) : D495 - D499
  • [36] CHARACTERIZATION OF FLUORINE-DOPED SNO2 FILMS PREPARED BY CHEMICAL VAPOR-DEPOSITION
    SAXENA, AK
    THANGARAJ, R
    SINGH, SP
    AGNIHOTRI, OP
    THIN SOLID FILMS, 1985, 131 (1-2) : 121 - 129
  • [37] FLUORINE-DOPED TIN DIOXIDE THIN-FILMS PREPARED BY CHEMICAL VAPOR-DEPOSITION
    MARUYAMA, T
    TABATA, K
    JOURNAL OF APPLIED PHYSICS, 1990, 68 (08) : 4282 - 4285
  • [38] Highly conductive and transparent Ti-doped zinc oxide thin films
    Lu, YM
    Tsai, SI
    Chang, CM
    FLEXIBLE ELECTRONICS-MATERIALS AND DEVICE TECHNOLOGY, 2003, 769 : 349 - 357
  • [39] THE SURFACE MODIFICATION OF FLUORINE-DOPED TIN OXIDE BY THE UNDERPOTENTIAL DEPOSITION OF NOBLE-METALS
    COLTON, RH
    HAGER, HE
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (12) : 2530 - 2535
  • [40] Structural and electrical properties for fluorine-doped silicon oxide films prepared by biased helicon-plasma chemical vapor deposition
    Tamura, T
    Sakai, J
    Satoh, M
    Inoue, Y
    Yoshitaka, H
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (3B): : 1627 - 1630