High-performance gold/graphene/germanium photodetector based on a graphene-on-germanium wafer

被引:4
作者
Jiang, Haiyan [1 ,2 ]
Li, Bo [1 ,2 ]
Wei, Yuning [1 ,2 ]
Feng, Shun [1 ]
Di, Zengfeng [3 ]
Xue, Zhongying [3 ]
Sun, Dongming [1 ,2 ]
Liu, Chi [1 ,2 ]
机构
[1] Chinese Acad Sci, Shenyang Natl Lab Mat Sci, Inst Met Res, 72 Wenhua Rd, Shenyang 110016, Peoples R China
[2] Univ Sci & Technol China, Sch Mat Sci & Engn, 72 Wenhua Rd, Shenyang 110016, Peoples R China
[3] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, 865 Changning Rd, Shanghai 200050, Peoples R China
基金
中国国家自然科学基金;
关键词
graphene; germanium; 2D material; Fermi-level pinning; photodetector; GE; SI;
D O I
10.1088/1361-6528/ac6ff0
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The metal/germanium (Ge) photodetectors have attracted much attention for their potential applications in on-chip optoelectronics. One critical issue is the relatively large dark current due to the limited Schottky potential barrier height of the metal/germanium junction, which is mainly caused by the small bandgap of Ge and the Fermi energy level pinning effect between the metal and Ge. The main technique to solve this problem is to insert a thin interlayer between the metal and Ge. However, so far, the dark current of the photodetectors is still large when using a bulk-material insertion layer, while when using a two-dimensional insertion layer, the area of the insertion layer is too small to support a mass production. Here, we report a gold/graphene/germanium photodetector with a wafer-scale graphene insertion layer using a 4 inch graphene-on-germanium wafer. The insertion layer significantly increases the potential barrier height, leading to a dark current as low as 1.6 mA cm(-2), and a responsivity of 1.82 A W-1 which are the best results for metal/Ge photodetectors reported so far. Our work contributes to the mass production of high-performance metal/Ge photodetectors.
引用
收藏
页数:7
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