Development of a Navigation-Grade MEMS IMU

被引：27

作者：

Johnson, Burgess ^{[1
]}

Albrecht, Curt ^{[2
]}

Braman, Todd ^{[3
]}

Christ, Kevin ^{[1
]}

Duffy, Patrick ^{[1
]}

Endean, Daniel ^{[1
]}

Gnerlich, Markus ^{[1
]}

Reinke, John ^{[1
]}

机构：

[1] Honeywell Int, Aerosp Adv Technol, Plymouth, MN 55441 USA

[2] Honeywell Int, Aerosp Sensors Guid & Nav, Plymouth, MN USA

[3] Honeywell Int, Aerosp Sensors Guid & Nav, Minneapolis, MN USA

来源：

2021 8TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS (INERTIAL 2021) | 2021年

关键词：

MEMS IMU; MEMS gyroscope; MEMS vibrating beam accelerometer; navigation-grade IMU;

D O I：

10.1109/INERTIAL51137.2021.9430466

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Performance data is presented from a MEMS-based IMU being developed at Honeywell with the objective of navigation-grade performance for a variety of applications. Design of the gyroscope is derived from that of the gyroscope in Honeywell's HG1930 tactical-grade MEMS IMU, a widely used tactical-grade MEMS IMU product. Fabrication processes similar to that of the gyroscope are used to fabricate a new vibrating beam accelerometer which measures acceleration via differential frequency change. Turn-on to turn-on bias repeatability better than 0.1 deg/hr for the gyroscopes and better than 20 micro-g for the accelerometers has been consistently demonstrated. Typical gyro ARW of 0.0035 deg/rt(hr) has been achieved, and accel root Allan variance is less than 10 micro-g at integration time of 1 second. The IMU has the same mechanical footprint (though slightly taller) and same electrical interface as Honeywell's HG1930 IMU.

引用

页数：4

共 5 条

[1]

Endean D., 2019, P 2019 IEEE INT SENS P 2019 IEEE INT SENS, P171

[2]

Endean D., 2019, ASME 2019 INT MECH E ASME 2019 INT MECH E

[3]

Froyum K, 2012, IEEE POSITION LOCAT, P831, DOI 10.1109/PLANS.2012.6236963

[4]

Johnson B., 2023, 2023 DGON INERTIAL S, P1

[5]

Johnson Burgess R., 2010, 2010 IEEE/ION Position, Location and Navigation Symposium - PLANS 2010, P168, DOI 10.1109/PLANS.2010.5507133

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