Dielectrically actuated liquid lens

被引:194
作者
Cheng, Chih-Cheng
Yeh, J. Andrew [1 ]
机构
[1] Instrument Tech Res Ctr, Hsinchu, Taiwan
[2] Natl Tsing Hua Univ, Inst Microelectmech & Syst, Hsinchu, Taiwan
关键词
D O I
10.1364/OE.15.007140
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A packaged liquid lens driven by the dielectric force was demonstrated. The liquid lens consisted of a low dielectric constant droplet and a high dielectric constant sealing liquid. The two non- conductive liquids were sealed in a chamber under the condition of iso-density. Focal length of a liquid lens with an aperture of 3mm changed from 34mm to 12mm in the range of 0-200V. Hysteresis was observed in the liquid lens, with a maximum value measured of 12.5 at 120 volts in terms of droplet's contact angle. The focal spot size measured approximately 80 mu m. Rise and fall times were 650ms and 300ms, respectively. The lens consumed 1mW of power when applying a 200 volt, 1 kHz signal. The longitudinal and transverse spherical aberrations were estimated to be nearly invariant when the focal length exceeded 20mm. (c) 2007 Optical Society of America.
引用
收藏
页码:7140 / 7145
页数:6
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