Impedance spectroscopy and electrical modeling of electrowetting on dielectric devices

被引:12
|
作者
Hu, X. [1 ]
Mibus, M. [2 ]
Knospe, C. R. [3 ]
Zangari, G. [2 ]
Reed, M. L. [1 ]
机构
[1] Univ Virginia, Elect & Comp Engn, Charlottesville, VA 22904 USA
[2] Univ Virginia, Mat Sci & Engn, Charlottesville, VA 22904 USA
[3] Univ Virginia, Mech & Aerosp Engn, Charlottesville, VA 22904 USA
关键词
electrowetting on dielectric (EWOD); impedance spectroscopy; electrical modeling; DIGITAL MICROFLUIDICS; ON-CHIP; ACTUATION; DISPLAYS; ELECTRODES;
D O I
10.1088/0960-1317/25/4/045020
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Using impedance spectroscopy, we have determined models for the elements which determine the ac electrical behavior in electrowetting on dielectric (EWOD) systems. Three commonly used EWOD electrode configurations were analyzed. In each case, the impedance can be modeled by a combination of elements, including the solution resistance, the capacitance of the dielectric layer, and the constant phase impedance of the electrode double layers. The sensitivity of the system's impedance to variations in the electrowetted area is also analyzed for these common configurations. We also demonstrate that the impedance per unit area of typical EWOD systems is invariant to bias voltage.
引用
收藏
页数:8
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