Effects of sputtering parameters on photoelectric properties of AZO film for CZTS solar cell

被引：30

作者：

Ma, Chuanhe ^{[1
]}

Lu, Xiaoshuang ^{[1
]}

Xu, Bin ^{[1
]}

Zhao, Fei ^{[1
]}

An, Xueer ^{[1
]}

Li, Bo ^{[1
]}

Sun, Lin ^{[1
]}

Jiang, Jinchun ^{[1
]}

Chen, Ye ^{[1
]}

Chu, Junhao ^{[1
]}

机构：

[1] East China Normal Univ, Dept Elect Engn, Minist Educ, Key Lab Polar Mat & Devices, Shanghai 200241, Peoples R China

来源：

JOURNAL OF ALLOYS AND COMPOUNDS | 2019年 / 774卷

基金：

中国国家自然科学基金;

关键词：

AZO; Sheet resistance; Optical transmittance; Burning treatment method; Cu2ZnSnS4 solar cells; DOPED ZNO FILMS; THIN-FILMS; OPTICAL-PROPERTIES; ANNEALING TEMPERATURE; THICKNESS; DEVICES; ABSORPTION; EFFICIENCY; EVOLUTION; DEFECTS;

D O I：

10.1016/j.jallcom.2018.09.056

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We have systematically investigated the effects of four critical sputtering parameters, power, pressure, temperature, and time, on the sheet resistance and optical transmittance of aluminum doped zinc oxide (AZO) grown by RF magnetron sputtering. Two distinct features that sheet resistance is extreme sensitive to aforesaid deposition parameters, while optical transmittance keep almost unchanged, have been disclosed. Based on these properties, high-grade AZO thin films (sheet resistance of 4.54U/sq, transmittance more than 84%, 1500 nm thickness) and a CZTS thin films solar cell with conversion efficiency of 5.1% on soda-lime glass were grown by optimizing deposition parameters to 0.3Pa, 200 degrees C, 120min, and 180W, using AZO ceramic target (2 wt% Al2O3). We also firstly modifying the traditional only solutions cleaning (OSC) method to burning treatment method (BTM), which is not only time-saving, but also avoiding the stripping of Mo layer and the usage of toxic and organic reagent of acetone. (c) 2018 Elsevier B.V. All rights reserved.

引用

页码：201 / 209

页数：9

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