Effect of GaN-on-diamond integration technology on its thermal properties

被引:3
|
作者
Li, Yao [1 ,2 ]
Zheng, Zixuan [1 ]
Zhang, Chao [1 ]
Pu, Hongbin [1 ]
机构
[1] Xian Univ Technol, Dept Elect Engn, CO-710048 Xian, Peoples R China
[2] Xidian Univ, Key Lab Wide Band Gap Semicond Mat, Minist Educ, CO-710071 Xian, Peoples R China
关键词
GaN-on-diamond; simulation; heat spreader; thermal conductivity; HEMTS; CONDUCTIVITY; TRANSISTORS; GROWTH;
D O I
10.1088/1361-6641/ac1c4f
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Two different integration technologies of GaN-on-diamond are explored, direct growth of polycrystalline diamond (PCD) on GaN (sample A) and deposition of GaN on PCD (sample B). The reversed evolution of PCD grain structure is assumed for each technology, resulting in an increasing/decreasing tendency of thermal conductivity with growth thickness. Simulation of AlGaN/GaN high electron mobility transistors on PCD substrate with capped diamond is made considering anisotropic and inhomogeneous thermal conductivities of GaN and PCD, different combinations of thermal boundary resistance (TBR) values at the top diamond/GaN and bottom GaN/PCD substrate are investigated. The results show that the effect of top TBR is limited and increasing the bottom TBR from 6.5 to 100 m(2)K GW(-1) results in a temperature rise of 80.8 degrees C for sample A and 85.3 degrees C for sample B at power dissipation of 10 W mm(-1). Enlarging the thickness of capped diamond helps to reduce the junction temperature, which is more effective at small top TBR under constant bottom TBR and at large bottom TBR with fixed top TBR. In addition, increasing gate pitch is a promising solution to reduce junction temperature and a weak dependence of junction temperature on gate width is revealed.
引用
收藏
页数:7
相关论文
共 50 条
  • [21] FEM thermal and stress analysis of bonded GaN-on-diamond substrate
    Zhai, Wenbo
    Zhang, Jingwen
    Chen, Xudong
    Bu, Renan
    Wang, Hongxing
    Hou, Xun
    AIP ADVANCES, 2017, 7 (09):
  • [22] Impact of thermal boundary resistance on the thermal design of GaN-on-Diamond HEMTs
    Guo, Huaixin
    Kong, Yuechan
    Chen, Tangsheng
    2019 IEEE 69TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC), 2019, : 1842 - 1847
  • [23] Optimizing GaN-on-diamond Transistor Geometry for Maximum Output Power
    Pomeroy, J. W.
    Kuball, M.
    2014 IEEE COMPOUND SEMICONDUCTOR INTEGRATED CIRCUIT SYMPOSIUM (CSICS): INTEGRATED CIRCUITS IN GAAS, INP, SIGE, GAN AND OTHER COMPOUND SEMICONDUCTORS, 2014,
  • [24] Thermal Design Rules of AlGaN/GaN-Based Microwave Transistors on Diamond
    Gerrer, Thomas
    Pomeroy, James
    Yang, Feiyuan
    Francis, Daniel
    Carroll, Jim
    Loran, Brian
    Witkowski, Larry
    Yarborough, Marty
    Uren, Michael J.
    Kuball, Martin
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2021, 68 (04) : 1530 - 1536
  • [25] Thermal simulation of high power GaN-on-diamond substrates for HEMT applications
    Guo, Huaixin
    Kong, Yuechan
    Chen, Tangsheng
    DIAMOND AND RELATED MATERIALS, 2017, 73 : 260 - 266
  • [26] THERMAL SPREADING PERFORMANCE OF GaN-ON-DIAMOND SUBSTRATE HEMTS WITH LOCALIZED JOULE HEATING
    Azarifar, Mohammad
    Kara, Dogacan
    Donmezer, Nazli
    ISI BILIMI VE TEKNIGI DERGISI-JOURNAL OF THERMAL SCIENCE AND TECHNOLOGY, 2019, 39 (02) : 111 - 119
  • [27] Reducing GaN-on-diamond interfacial thermal resistance for high power transistor applications
    Sun, Huarui
    Simon, Roland B.
    Pomeroy, James W.
    Francis, Daniel
    Faili, Firooz
    Twitchen, Daniel J.
    Kuball, Martin
    APPLIED PHYSICS LETTERS, 2015, 106 (11)
  • [28] 3-inch GaN-on-Diamond HEMTs With Device-First Transfer Technology
    Liu, Tingting
    Kong, Yuechan
    Wu, Lishu
    Guo, Huaixin
    Zhou, Jianjun
    Kong, Cen
    Chen, Tangsheng
    IEEE ELECTRON DEVICE LETTERS, 2017, 38 (10) : 1417 - 1420
  • [29] Thermal Boundary Resistance Reduction by Interfacial Nanopatterning for GaN-on-Diamond Electronics Applications
    Ji, Xiaoyang
    Vanjari, Sai Charan
    Francis, Daniel
    Cuenca, Jerome A.
    Nandi, Arpit
    Cherns, David
    Williams, Oliver A.
    Ejeckam, Felix
    Pomeroy, James W.
    Kuball, Martin
    ACS APPLIED ELECTRONIC MATERIALS, 2025, 7 (07) : 2939 - 2946
  • [30] Low-Temperature Substrate Bonding Technology for High Power GaN-on-Diamond HEMTs
    Chu, Kenneth K.
    Chao, Pane C.
    Diaz, Jose A.
    Yurovchak, Thomas
    Creamer, Carlton T.
    Sweetland, Scott
    Kallaher, Raymond L.
    McGray, Craig
    2014 LESTER EASTMAN CONFERENCE ON HIGH PERFORMANCE DEVICES (LEC), 2014,