Microfabrication of Photosensitive Glass by Femtosecond Laser Direct Writing

被引：0

作者：

Cheng, C. W. ^{[1
]}

Chen, J. S. ^{[2
]}

Lee, P. X. ^{[2
]}

Chien, C. W. ^{[1
]}

机构：

[1] ITRI South, Ind Technol Res Inst, 8 Gongyan Rd, Liujia Shiang 734, Tainan County, Taiwan

[2] Natl Chung Cheng Univ, Dept Mech Engn, Chiayi 621, Taiwan

来源：

ADVANCES IN ABRASIVE TECHNOLOGY XIII | 2010年 / 126-128卷

关键词：

Femtosecond laser; microstructure; photosensitive glass;

D O I：

10.4028/www.scientific.net/AMR.126-128.394

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this study, a method for the fabrication of microstructures on the surface and inside photosensitive glass (Foturan glass) by femtosecond laser-induced modification was developed. This technique was followed by heat treatment to crystallize the modified area, and the specimen was then placed in an HF acid solution for chemical etching. The fabricated microstructures were observed using scanning electron microscopy (SEM). Two examples: (a) a U-shaped microchannel and (b) an arc-type microchannel formed inside glass are presented.

引用

页码：394 / +

页数：3

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