Web-based metrology performance diagnostics

被引:0
作者
Sundaram, G [1 ]
Mastovich, M [1 ]
Avidor, R [1 ]
Remillard, J [1 ]
Brandom, R [1 ]
机构
[1] Schlumberger Technol Inc, Concord, MA 01742 USA
来源
METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XVII, PTS 1 AND 2 | 2003年 / 5038卷
关键词
worldwide web; metrology; diagnostics; CDSEM; recipes; automation; ULV;
D O I
10.1117/12.487603
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Current realities of tighter process tolerances combined with continued reduction in engineering resources per metrology tool require that every step of controlling a process be made more efficient. Analyzing the quality of metrology results, from equipment such as CD SEMs, can involve many factors that include image quality, measurement outputs, focus setting, and a multitude of system settings that play a role in the metrology results. The most efficient means of accessing large volumes of data today is via the World Wide Web(1) This paper provides examples of metrology problem resolutions that were achieved through the use of WWW on-line analysis of CD SEM results. The relational database that contains the measurement results, CID SEM settings, and metrology and pattern recognition images can be accessed from any fab PC, and can also be accessed from outside the fab by personnel with proper levels of security. Simple navigation through a web browser and the completeness of the data in the results database greatly improve the efficiency of the metrologist and the qualit I y of the diagnosis, for improved process control and personal productivity.
引用
收藏
页码:1203 / 1210
页数:8
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