The current-voltage characteristics of V2O5/n-Si Schottky diodes formed with different metals

被引:11
作者
Kaya, Meltem Donmez [1 ]
Sertel, Buse Comert [1 ]
Sonmez, Nihan Akin [1 ,2 ]
Cakmak, Mehmet [1 ,2 ]
Ozcelik, Suleyman [1 ,2 ]
机构
[1] Gazi Univ, Photon Applicat & Res Ctr, TR-06500 Ankara, Turkey
[2] Gazi Univ, Dept Photon, TR-06500 Ankara, Turkey
关键词
V2O5; THIN-FILMS; GAS-SENSING PROPERTIES; ELECTRICAL-PROPERTIES; VANADIUM-OXIDE; ELECTROCHEMICAL PROPERTIES; OPTICAL-PROPERTIES; BARRIER DIODES; TEMPERATURE; THICKNESS; NANORODS;
D O I
10.1007/s10854-021-06534-w
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work, we reported the effect of different metal contacts on performance of metal-oxide-semiconductor (MOS)-structured Schottky diodes formed with the vanadium pentoxide thin film (V2O5) interfacial layer. V2O5 thin films were deposited by radio frequency (RF) magnetron sputtering on n-type silicon (n-Si) and Corning glass (CG) substrates at room temperature. Then, the obtained films were annealed at 300 degrees C and 500 degrees C. The effects of annealing temperature on physical properties of the films were investigated by X-ray photoelectron spectroscopy, secondary ion mass spectroscopy, atomic force microscopy, UV-Vis spectroscopy, and photoluminescence. The MOS-structured Al/V2O5/n-Si, Ti/V2O5/n-Si and Au/V2O5/n-Si Schottky barrier diodes (SBDs) performance was analyzed with I-V measurements at room temperature. The Schottky diodes were compared with each other according to three methods (Classic, Norde and Cheung). The experimental results indicated that the Schottky diode produced with Al contact had better performance than the others.
引用
收藏
页码:20284 / 20294
页数:11
相关论文
共 67 条
[1]   Fabrication and characterization of V2O5 nanorods based metal-semiconductor-metal photodetector [J].
Abd-Alghafour, N. M. ;
Ahmed, Naser. M. ;
Hassan, Z. .
SENSORS AND ACTUATORS A-PHYSICAL, 2016, 250 :250-257
[2]   Temperature effects on the structural, optical, electrical and morphological properties of the RF-sputtered Mo thin films [J].
Akcay, N. ;
Akin, N. ;
Comert, B. ;
Ozcelik, S. .
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2017, 28 (01) :399-406
[3]   Influence of RF power on the opto-electrical and structural properties of gallium-doped zinc oxide thin films [J].
Akin, N. ;
Kinaci, B. ;
Ozen, Y. ;
Ozcelik, S. .
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2017, 28 (10) :7376-7384
[4]   Effect of solution molarity on the characteristics of vanadium pentoxide thin film [J].
Akl, Alaa A. .
APPLIED SURFACE SCIENCE, 2006, 252 (24) :8745-8750
[5]   Effect of platinum doping on the structural and electrical properties of SnO2 thin films [J].
Asar, Tarik ;
Korkmaz, Burak ;
Ozcelik, Suleyman .
JOURNAL OF EXPERIMENTAL NANOSCIENCE, 2016, 11 (16) :1285-1306
[6]   Impact of Cu concentration on the properties of spray coated Cu-MoO3 thin films: evaluation of n-CuMoO3/p-Si junction diodes by J-V, Norde and Cheung's methods [J].
Balaji, M. ;
Chandrasekaran, J. ;
Raja, M. ;
Marnadu, R. .
MATERIALS RESEARCH EXPRESS, 2019, 6 (10)
[7]   Upgraded photosensitivity under the influence of Yb doped on V2O5 thin films as an interfacial layer in MIS type Schottky barrier diode as photodiode application [J].
Balasubramani, V ;
Chandrasekaran, J. ;
Manikandan, V ;
Le, Top Khac ;
Marnadu, R. ;
Vivek, P. .
JOURNAL OF SOLID STATE CHEMISTRY, 2021, 301
[8]   Colossal photosensitive boost in Schottky diode behaviour with Ce-V2O5 interfaced layer of MIS structure [J].
Balasubramani, V ;
Chandrasekaran, J. ;
Tien Dai Nguyen ;
Maruthamuthu, S. ;
Marnadu, R. ;
Vivek, P. ;
Sugarthi, S. .
SENSORS AND ACTUATORS A-PHYSICAL, 2020, 315
[9]   Influence of rare earth doping concentrations on the properties of spin coated V2O5 thin films and Cu/Nd-V2O5/n-Si Schottky barrier diodes [J].
Balasubramani, V ;
Chandrasekaran, J. ;
Manikandan, V ;
Marnadu, R. ;
Vivek, P. ;
Balraju, P. .
INORGANIC CHEMISTRY COMMUNICATIONS, 2020, 119
[10]   Impact of Annealing Temperature on Spin Coated V2O5 Thin Films as Interfacial Layer in Cu/V2O5/n-Si Structured Schottky Barrier Diodes [J].
Balasubramani, V. ;
Chandrasekaran, J. ;
Marnadu, R. ;
Vivek, P. ;
Maruthamuthu, S. ;
Rajesh, S. .
JOURNAL OF INORGANIC AND ORGANOMETALLIC POLYMERS AND MATERIALS, 2019, 29 (05) :1533-1547