Very near field optics: A frontier technology

被引：0
|
作者：
Goodell, JB
机构：
来源：
NONDESTRUCTIVE CHARACTERIZATION OF MATERIALS VII, PTS 1 AND 2 | 1996年 / 210-2卷
关键词：
optics; diffraction; resolution; metrology; encoder; fresnel diffraction; optical near field; proximal field;
D O I：
10.4028/www.scientific.net/MSF.210-213.275
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Diffraction fields very close to the source are shown to have spatial resolution well beyond ''Diffraction Limits''. This fact enabled the design and manufacture of a lensless eighteen bit absolute encoder.
引用
收藏
页码：275 / 281
页数：7
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