A Closed-Loop Controlled CMOS MEMS Biaxial Scanning Mirror for Projection Displays

被引：19
作者：
Tsai, Cho-Chuan [1 ]
Li, Zhong-He [2 ,3 ]
Lin, Yu-Tang [2 ,4 ]
Lu, Michael S. -C. [1 ,2 ]
机构：
[1] Natl Tsing Hua Univ, Dept Elect Engn, Hsinchu 30013, Taiwan
[2] Natl Tsing Hua Univ, Inst Elect Engn, Hsinchu 30013, Taiwan
[3] Nuvoton Technol Corp, Hsinchu 300, Taiwan
[4] NVIDIA, Hsinchu 300, Taiwan
来源：
IEEE SENSORS JOURNAL | 2020年 / 20卷 / 01期
关键词：
CMOS MEMS; closed-loop control; electromagnetic actuation; piezoresistive sensor; scanning mirror; MICROSCANNER;
D O I：
10.1109/JSEN.2019.2942331
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This work presents a biaxial electromagnetically-driven piezoresistively sensed scanning mirror fabricated in a CMOS (complementary metal oxide semiconductor) process. The structure containing the CMOS metal/dielectric layers and underlying silicon is released after back- and front-side etch. The drive coil and piezoresistive sensors are implemented by the metal and polysilicon thin films. Biaxial resonances at 1.13 kHz and 41.5 kHz, and an optical angle of 50 degrees for horizontal scan under a drive current of 12.5 mA are measured. Closed-loop control and oscillation for vertical and horizontal scans are also demonstrated for practical applications.
引用
收藏
页码：242 / 249
页数：8
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