Rheological behaviour of Magnetorheological polishing fluid for Si polishing

被引:1
作者
Saraswathamma, K. [1 ]
Jha, Sunil [2 ]
Rao, Venkateswara P. [2 ]
机构
[1] Osmania Univ, Dept Mech Engn, Hyderabad, Andhra Pradesh, India
[2] Indian Inst Technol Delhi, Dept Mech Engn, Delhi, India
关键词
Parallel plate magnetorheometer; Carbonyl iron powder; cerium oxide abarsive; magnetizing current; yield stress; viscosity; STRESS;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The finishing mechanism of the magnetorheological finishing (MRF) process primarily depends on the Magnetorheological polishing (MRP) fluid, which acts as a tool in finishing the component surfaces. MRP fluid imparts strength to the polishing spot under the applied magnetizing currents/magnetic field strength. Behaviour of this fluid mainly influenced by the size and shape of its constituents, volume concentration, particle size distribution, and applied magnetic field strength. A detailed study was undertaken on the role of carbonyl iron particle (CIP) and abrasive size on the rheological behaviour of the MRP fluid under various magnetic flux densities. Rheological characterization study was carried out using three different models such as Bingham plastic model, Herschel-Bulkley model and Casson fluid model. MRP fluid rheological properties such as yield stress and viscosity were evaluated using parallel plate magnetorheometer. (C) 2017 Elsevier Ltd. All rights reserved.
引用
收藏
页码:1478 / 1491
页数:14
相关论文
共 20 条
[1]   Effect of pH on ceria-silica interactions during chemical mechanical polishing [J].
Abiade, JT ;
Choi, W ;
Singh, RK .
JOURNAL OF MATERIALS RESEARCH, 2005, 20 (05) :1139-1145
[2]   CHEMICAL PROCESSES IN GLASS POLISHING [J].
COOK, LM .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1990, 120 (1-3) :152-171
[3]  
Genc S., 2002, SYNTHESIS PROPERTIES
[4]   Behavior of magnetorheological fluids [J].
Ginder, JM .
MRS BULLETIN, 1998, 23 (08) :26-29
[5]  
Gorodkin S. R., 2009, Journal of Physics: Conference Series, V149, DOI 10.1088/1742-6596/149/1/012051
[6]   Structures of a magnetorheological fluid [J].
Gulley, GL ;
Tao, R .
INTERNATIONAL JOURNAL OF MODERN PHYSICS B, 2001, 15 (6-7) :851-858
[7]  
Jacobs S. D., 2002, EP Patent, Patent No. [0,858,381, 0858381]
[8]  
Jha S, 2009, INT J ADV MANUF TECH, V42, P656, DOI 10.1007/S00170-008-1637-8
[9]   A model of the behaviour of magnetorheological materials [J].
Jolly, MR ;
Carlson, JD ;
Munoz, BC .
SMART MATERIALS & STRUCTURES, 1996, 5 (05) :607-614
[10]   Surface finishing and evaluation of three-dimensional silicon microchannel using magnetorheological fluid [J].
Kim, WB ;
Lee, SH ;
Min, BK .
JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME, 2004, 126 (04) :772-778