Pressure calibration of a digital microelectromechanical system microphone by comparison

被引:10
|
作者
Prato, Andrea [1 ]
Montali, Nicola [1 ]
Guglielmone, Claudio [1 ]
Schiavi, Alessandro [1 ]
机构
[1] Ist Nazl Ric Metrol INRiM, Str Cacce 91, I-10135 Turin, Italy
关键词
Compendex;
D O I
10.1121/1.5059333
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
In the field of noise control and monitoring, a new generation of small and low-cost microelectro-mechanical system (MEMS) microphones is nowadays widely adopted. MEMS microphones, after recognition as traceable measurement instruments, could open up promising measurements based on wireless sensor networks. Current standards do not apply specifically to digital microphones. In this work, a pressure calibration procedure by comparison is carried out for a digital MEMS microphone and a sensitivity parameter suitable for metrological purposes is proposed. Measurement procedure and results between 20Hz and 20 kHz are presented along with uncertainty contributions. (C) 2018 Acoustical Society of America.
引用
收藏
页码:EL297 / EL303
页数:7
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