Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity

被引：21
|
作者：
Mele, L. [1 ]
Rossi, T. [1 ]
Riccio, M. [3 ]
Iervolino, E. [1 ,2 ]
Santagata, F. [1 ]
Irace, A. [3 ]
Breglio, G. [3 ]
Creemer, J. F. [1 ]
Sarro, P. M. [1 ]
机构：
[1] Delft Univ Technol, DIMES, Feldmannweg 17, NL-2628 CT Delft, Netherlands
[2] Xensor Integrat, NL-2645EJ Delfgauw, Netherlands
[3] Univ Naples Federico II, I-80121 Naples, Italy
来源：
EUROSENSORS XXV | 2011年 / 25卷
关键词：
microhotplate; temperature; uniformity; molybdenum; SENSORS;
D O I：
10.1016/j.proeng.2011.12.096
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
This paper presents a microhotplate working up to 1200 degrees C with improved temperature uniformity by optimizing the geometry of the thin-film resistor. By varying the linewidth of meandering resistive tracks, heat is generated in such a way to have more homogenous temperature distribution. The microhotplates are fabricated using molybdenum as conductive material for the heater. Infrared thermal mapping shows that the temperature variation over the heated area is reduced from an initial 13% to 4%. (C) 2011 Published by Elsevier Ltd.
引用
收藏
页数：4
相关论文
共 50 条
  • [1] Design and optimization based on uncertainty analysis in electro-thermal excited MEMS resonant sensor
    Huichao Shi
    Shangchun Fan
    Yuwen Zhang
    Jinhao Sun
    Microsystem Technologies, 2015, 21 : 757 - 771
  • [2] Design and optimization based on uncertainty analysis in electro-thermal excited MEMS resonant sensor
    Shi, Huichao
    Fan, Shangchun
    Zhang, Yuwen
    Sun, Jinhao
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2015, 21 (04): : 757 - 771
  • [3] Electro-thermal simulation of MEMS elements
    Rencz, M
    Székely, V
    Poppe, A
    Courtois, B
    DTIP 2003: DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS 2003, 2003, : 15 - 20
  • [4] An Electro-Thermal MEMS Variable Capacitor
    Mehran, Mahdiyeh
    Rotani, Elahe Zarei
    Shirazi, Arman Delpasand Motlagh
    Hakimi, Ahmad
    2020 28TH IRANIAN CONFERENCE ON ELECTRICAL ENGINEERING (ICEE), 2020, : 1909 - 1913
  • [5] Characterization and Modeling of an Electro-thermal MEMS Structure
    Szabo, P. G.
    Szekely, V.
    DTIP 2008: SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS, 2008, : 350 - 354
  • [6] Characterization and modeling of electro-thermal MEMS structures
    Szabo, Peter Gabor
    Vladimir Szekely
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2009, 15 (08): : 1293 - 1301
  • [7] Characterization and modeling of electro-thermal MEMS structures
    Péter Gábor Szabó
    Vladimír Székely
    Microsystem Technologies, 2009, 15 : 1293 - 1301
  • [8] Electro-thermal tuning of MEMS VCSEL with giant wavelength-temperature dependence
    Nakahama, Masanori
    Sano, Hayato
    Nakata, Norihiko
    Matsutani, Akihiro
    Koyama, Fumio
    IEICE ELECTRONICS EXPRESS, 2012, 9 (05): : 416 - 421
  • [9] Giant Wavelength-temperature Dependence and Electro-thermal Tuning of MEMS VCSEL
    Nakahama, Masanori
    Nakata, Norihiko
    Sano, Hayato
    Matsutani, Akihiro
    Koyama, Fumio
    2011 IEEE PHOTONICS CONFERENCE (PHO), 2011, : 913 - 914
  • [10] Electro-thermal Stimuli for MEMS Testing in FSBM Technology
    N. Dumas
    F. Azaïs
    L. Latorre
    P. Nouet
    Journal of Electronic Testing, 2006, 22 : 189 - 198
12345