Multifunctional thin film sensor system as monitoring system in production

被引：0

作者：

Biehl, Saskia ^{[1
]}

Rumposch, Christian ^{[1
]}

Paetsch, Nancy ^{[1
]}

机构：

[1] Fraunhofer Inst Surface Engn & Thin Films, D-38108 Braunschweig, Germany

来源：

SMART SENSORS, ACTUATORS, AND MEMS VII; AND CYBER PHYSICAL SYSTEMS | 2015年 / 9517卷

关键词：

thin film sensor system; piezoresistive; thermoresistive; sensor module; metal sheet bending; injection molding; DIAMOND-LIKE CARBON;

D O I：

10.1117/12.2178914

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The two most important measurement categories in production are temperature and load. Therefore commercial sensors are applied in machinery as near as possible to the working parts. For a cost efficient production the integration of sensor elements directly on top of the surface in the heavily loaded regions is essential to get the real temperature and load distributions during the production process. Therefore a new multifunctional thin film sensor system is in development. This multilayer system combines thermoresistive sensor structures with piezoresistive ones and exists out of wear resistant carbon based layers [1, 2, 3, 4, 5]. The sensor data will lead to a deeper process understanding, to optimization of simulation tools, to reduction of rejects and to an improvement of flexibility in production.

引用

页数：10

共 44 条

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