Novel Principle of Contactless Gauge Block Calibration

被引：21

作者：

Buchta, Zdenek ^{[1
]}

Rerucha, Simon ^{[1
]}

Mikel, Bretislav ^{[1
]}

Cizek, Martin ^{[1
]}

Lazar, Josef ^{[1
]}

Cip, Ondrej ^{[1
]}

机构：

[1] Acad Sci Czech Republ, Inst Sci Instruments, CS-61264 Brno, Czech Republic

来源：

SENSORS | 2012年 / 12卷 / 03期

关键词：

low-coherence interferometry; gauge block; nanometrology; LASER; INTERFEROMETRY; INDEX; AIR;

D O I：

10.3390/s120303350

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

In this paper, a novel principle of contactless gauge block calibration is presented. The principle of contactless gauge block calibration combines low-coherence interferometry and laser interferometry. An experimental setup combines Dowell interferometer and Michelson interferometer to ensure a gauge block length determination with direct traceability to the primary length standard. By monitoring both gauge block sides with a digital camera gauge block 3D surface measurements are possible too. The principle presented is protected by the Czech national patent No. 302948.

引用

页码：3350 / 3358

页数：9

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