NO2-gas-sensing properties of mixed In2O3-SnO2 thin films

被引：45

作者：

Forleo, A ^{[1
]}

Francioso, L ^{[1
]}

Epifani, M ^{[1
]}

Capone, S ^{[1
]}

Taurino, AM ^{[1
]}

Siciliano, P ^{[1
]}

机构：

[1] CNR, IMM, Sez Lecce, I-73100 Lecce, Italy

来源：

THIN SOLID FILMS | 2005年 / 490卷 / 01期

关键词：

indium-tin oxide; gas sensors; nitrogen oxide;

D O I：

10.1016/j.tsf.2005.04.022

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Semiconductor sensors based on nanocrystalline SnO2, In2O3 and In2O3-SnO2 thin films have been investigated for detecting low concentration (2-20 ppm) of nitrogen dioxide in dry air. In this work the gas-sensitive layers were prepared by modified sol-gel methods making use of non-standard precursors and a suitable surfactant. The samples have been structurally and morphologically characterized by Xray diffraction and SEM, respectively. Good gas-sensing responses towards NO2 have been found for all the prepared samples with improved performances for the In2O3-SnO2 based sensor. The performances of the sensors have been discussed according to the surface chemical reactions between the gas phase and the semiconductor. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：68 / 73

页数：6

共 21 条

[1] [Anonymous], 2004, ENCY NANOSCI NANOTEC
[2] Air pollution monitoring using tin-oxide-based microreactor systems
Becker, T
Mühlberger, S
Bosch-von Braunmühl, C
Müller, G
Ziemann, T
Hechtenberg, KV
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 2000, 69 (1-2) : 108 - 119
[3] Influence of the catalytic introduction procedure on the nano-SnO2 gas sensor performances -: Where and how stay the catalytic atoms?
Cabot, A
Diéguez, A
Romano-Rodríguez, A
Morante, JR
Bârsan, N
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 2001, 79 (2-3) : 98 - 106
[4] Application of a semiconductor sol-gel sensor array to the discrimination of pollutants in air
Capone, S
Epifani, M
Quaranta, F
Siciliano, P
Vasanelli, L
[J]. THIN SOLID FILMS, 2001, 391 (02) : 314 - 319
[5] Analysis of CO and CH4 gas mixtures by using a micromachined sensor array
Capone, S
Siciliano, P
Bârsan, N
Weimar, U
Vasanelli, L
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 2001, 78 (1-3) : 40 - 48
[6] CAPONE S, 2001, P 6 IT C SENS MICR 5, P144
[7] In2O3 thin films obtained through a chemical complexation based sol-gel process and their application as gas sensor devices
Epifani, M
Capone, S
Rella, R
Siciliano, P
Vasanelli, L
Faglia, G
Nelli, P
Sberveglieri, G
[J]. JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2003, 26 (1-3) : 741 - 744
[8] Selectivity enhancement of SnO2 sensors by means of operating temperature modulation
Fort, A
Gregorkiewitz, M
Machetti, N
Rocchi, S
Serrano, B
Tondi, L
Ulivieri, N
Vignoli, V
Faglia, G
Comini, E
[J]. THIN SOLID FILMS, 2002, 418 (01) : 2 - 8
[9] In2O3 and MoO3-In2O3 thin film semiconductor sensors:: interaction with NO2 and O3
Gurlo, A
Barsan, N
Ivanovskaya, M
Weimar, U
Gopel, W
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1998, 47 (1-3): : 92 - 99
[10] Grain size control in nanocrystalline In2O3 semiconductor gas sensors
Gurlo, A
Ivanovskaya, M
Barsan, N
Schweizer-Berberich, M
Weimar, U
Gopel, W
Dieguez, A
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1997, 44 (1-3): : 327 - 333

← 1 2 3 →