Magnetic Field Tunable Ferromagnetic Shape Memory Alloy-Based SAW Resonator

In this letter, a novel highly magnetostrictive ferromagnetic shape memory alloy (FSMA) interdigital transducers (IDTs) have been fabricated over AlN piezoelectric layer in the surface acoustic wave (SAW) resonator. The influence of an external magnetic field on the fabricated SAW device has been investigated in terms of device parameters such as resonance f(R)equency (f(R)), frequency shift Delta f(R)/f(R) (%) and electro-mechanicalcouplingcoefficient (K-2). A resonance f(R)equency of similar to 2.258GHz was observed at 0 Oe and a f(R)equency shift (Delta f(R)) similar to 89 MHz occurs at 1350 Oe. The present device shows high tunability (Delta f(R)/f(R)) similar to 3.9 %. It could be ascribed to the strain-induced giant Delta E-effect in the highly magnetostrictive Ni-Mn-In layer at room temperature. The experimental results have been fitted with a modified Butterworth-Van Dyke (mBVD) circuit model to extract the equivalent circuit parameters in the absence and presence of the magnetic field. A maximum electromechanical coupling coefficient was calculated to be similar to 0.58, which decreases to 0.35 with the magnetic field. The fabricated SAW resonator displays a high sensitivity of similar to 0.66 Hz/nT. Such magnetostrictive FSMA IDTs based tunable SAW resonator could be a potential candidate for room temperature remote magnetic field sensors and multifunctional MEMS devices.