An Electrothermal Micromirror with J-shaped Bimorph Microactuators

被引：0
|
作者：
Zhou, Liang [1 ]
Wang, Dingkang [1 ]
Xie, Huikai [1 ]
机构：
[1] Univ Florida, Dept Elect & Comp Engn, Gainesville, FL 32611 USA
来源：
2019 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) | 2019年
基金：
美国国家卫生研究院; 美国国家科学基金会;
关键词：
J-shaped bimorph; micromirror; electrothermal actuation; MEMS MIRROR;
D O I：
10.1109/omn.2019.8925056
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A tip-tilt-piston micromirror with four J-shaped bimorph microactuators is developed to increase robustness and stability. The diameter of the central mirror plate is 1 mm and the footprint of the entire device is only 1.6 x 1.6 mm(2). The micromirror scans 3 degrees (optical) at 2.8 Vdc. The piston mode and rotation mode are measured at 880 Hz and 1555 Hz, respectively.
引用
收藏
页码：226 / 227
页数：2
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