An Electrothermal Micromirror with J-shaped Bimorph Microactuators

被引：0
|
作者：
Zhou, Liang [1 ]
Wang, Dingkang [1 ]
Xie, Huikai [1 ]
机构：
[1] Univ Florida, Dept Elect & Comp Engn, Gainesville, FL 32611 USA
来源：
2019 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) | 2019年
基金：
美国国家卫生研究院; 美国国家科学基金会;
关键词：
J-shaped bimorph; micromirror; electrothermal actuation; MEMS MIRROR;
D O I：
10.1109/omn.2019.8925056
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A tip-tilt-piston micromirror with four J-shaped bimorph microactuators is developed to increase robustness and stability. The diameter of the central mirror plate is 1 mm and the footprint of the entire device is only 1.6 x 1.6 mm(2). The micromirror scans 3 degrees (optical) at 2.8 Vdc. The piston mode and rotation mode are measured at 880 Hz and 1555 Hz, respectively.
引用
收藏
页码：226 / 227
页数：2
相关论文
共 50 条
  • [1] A bimorph electrothermal actuator for micromirror devices
    Evstafyev, Sergey S.
    Timoshenkov, Sergey P.
    Britkov, Igor M.
    Samoilykov, Vyacheslav K.
    Tereshhenko, Anatolij M.
    MICRO- AND NANOTECHNOLOGY SENSORS, SYSTEMS, AND APPLICATIONS VII, 2015, 9467
  • [2] Polymer constraint effect for electrothermal bimorph microactuators
    Duc, T. Chu
    Lau, G. K.
    Sarro, P. M.
    APPLIED PHYSICS LETTERS, 2007, 91 (10)
  • [3] J-SHAPED CURVES
    WILHELMSEN, L
    JOURNAL OF HUMAN HYPERTENSION, 1990, 4 : 21 - 25
  • [4] Reappearance of the J-shaped curve
    Frohlich, ED
    HYPERTENSION, 1999, 34 (06) : 1179 - 1180
  • [5] J-shaped relationship in hypertension
    Simon, G
    ANNALS OF INTERNAL MEDICINE, 2003, 138 (01) : 78 - 78
  • [6] A J-shaped mass in the abdomen
    Dadayal, G
    Duttaroy, DD
    Yeluri, S
    MEDICAL JOURNAL OF AUSTRALIA, 2005, 183 (11-12) : 673 - 673
  • [7] Alcohol and J-shaped curves
    Andréasson, S
    ALCOHOLISM-CLINICAL AND EXPERIMENTAL RESEARCH, 1998, 22 (07) : 359S - 364S
  • [8] An Ultra-Fast Electrothermal Micromirror with Bimorph Actuators Made of Copper/Tungsten
    Wang, Dingkang
    Zhang, Xiaoyang
    Zhou, Liang
    Liang, Mengyue
    Zhang, Daihua
    Xie, Huikai
    2017 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2017, : 87 - 88
  • [9] A ROBUST, FAST ELECTROTHERMAL MICROMIRROR WITH SYMMETRIC BIMORPH ACTUATORS MADE OF COPPER/TUNGSTEN
    Zhang, Xiaoyang
    Li, Boxiao
    Li, Xingde
    Xie, Huikai
    2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2015, : 912 - 915
  • [10] The J-shaped distribution of citedness
    Nicolaisen, J
    JOURNAL OF DOCUMENTATION, 2002, 58 (04) : 383 - 395
12345