Vertical pattern decay and lateral in-phase capillary breakup of nanoimprinted bilayer polymer films

被引:14
作者
Ahn, Dae Up [1 ]
Ding, Yifu [1 ]
机构
[1] Univ Colorado, Dept Mech Engn, Boulder, CO 80309 USA
基金
美国国家科学基金会;
关键词
POLY(METHYL METHACRYLATE); MOLECULAR WEIGHT; RESIDUAL-STRESS; THIN-FILMS; LITHOGRAPHY; BLENDS; LIQUID; SURFACE; VISCOELASTICITY; FABRICATION;
D O I
10.1039/c0sm01373k
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We report the morphological evolutions of nanoimprinted polystyrene (PS)/polymethyl methacrylate (PMMA) bilayers during thermal annealing. At an annealing temperature above the glass transition temperatures of both polymers, the PS/PMMA bilayer patterns undergo a sequential event of morphological evolutions. At the early stage, the bilayer patterns decay vertically, which leads to a continuous PS layer over the PMMA patterns. Further annealing leads to an intriguing "in-phase" capillary breakup of the PS stripes. As a result, strings of PS droplets develop at the direction orthogonal to the original pattern line directions. At the final stage, these PS droplets anisotropically coalesce into thicker stripes, which eventually break up into larger discrete droplets due to the Rayleigh instability. Our study demonstrates that the mobile and corrugated PS/PMMA interfaces dictate both the kinetics of the vertical pattern decay and the correlated lateral instability. Both polymers directly participate in the pattern evolutions, different from the well-documented dewetting of polymers confined on elastic topographic substrates.
引用
收藏
页码:3794 / 3800
页数:7
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