Strain induced effects on the transport properties of metamorphic InAlAs/InGaAs quantum wells

被引:72
作者
Capotondi, F
Biasiol, G
Ercolani, D
Grillo, V
Carlino, E
Romanato, F
Sorba, L
机构
[1] Ist Nazl Fis Nucl, Lab Nazl TASC, I-34012 Trieste, Italy
[2] Univ Modena & Reggio Emilia, I-41100 Modena, Italy
关键词
InGaAs; 448 structural properties; 112 electrical properties and measurements; 294 molecular beam epitaxy (MBE);
D O I
10.1016/j.tsf.2005.02.013
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The relationship between structural and low-temperature transport properties is explored for InxAl1-xAs/InxGa1-xAs metamorphic quantum wells with x > 0.7 grown on GaAs by molecular beam epitaxy. Different step-graded buffer layers are used to gradually adapt the in-plane lattice parameter from the GaAs towards the InGaAs value. We show that using buffer layers with a suitable maximum In content the residual compressive strain in the quantum well region can be strongly reduced. Samples with virtually no residual strain in the quantum well region show a low-temperature electron mobility up to 29 m(2)/V s while for samples with higher residual compressive strain the low-temperature mobility is reduced. Furthermore, for samples with buffers inducing a tensile strain in the quantum well region, deep grooves are observed on the surface, and in correspondence we notice a strong deterioration of the low-temperature transport properties. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:400 / 407
页数:8
相关论文
共 37 条
[1]   LIKE-SIGN ASYMMETRIC DISLOCATIONS IN ZINC-BLENDE STRUCTURE [J].
ABRAHAMS, MS ;
BLANC, J ;
BUIOCCHI, CJ .
APPLIED PHYSICS LETTERS, 1972, 21 (05) :185-&
[2]   Two-dimensional electron gas formation in undoped In0.75Ga0.25As/In0.75Al0.25As quantum wells [J].
Capotondi, F ;
Biasiol, G ;
Vobornik, I ;
Sorba, L ;
Giazotto, F ;
Cavallini, A ;
Fraboni, B .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (02) :702-706
[3]  
CAPOTONDI F, IN PRESS J CRYST GRO
[4]   STRUCTURAL CHARACTERIZATION OF LATTICE-MATCHED ALXIN1-XAS/INP AND GAYIN1-YAS/INP HETEROSTRUCTURES BY TRANSMISSION ELECTRON-MICROSCOPY AND HIGH-RESOLUTION X-RAY-DIFFRACTION [J].
CARLINO, E ;
GIANNINI, C ;
TAPFER, L ;
CATALANO, M ;
TOURNIE, E ;
ZHANG, YH ;
PLOOG, KH .
JOURNAL OF APPLIED PHYSICS, 1995, 78 (04) :2403-2410
[5]   Comparison of In0.33Al0.67As/In0.34Ga0.66As on GaAs metamorphic high electron mobility transistors grown by molecular beam epitaxy with normal and inverse step on linear graded buffer layers [J].
Cordier, Y ;
Chauveau, JM ;
Ferre, D ;
Dipersio, J .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (05) :2513-2517
[6]   Magnetotransport in high-g-factor low-density two-dimensional electron systems confined in In0.75Ga0.25As/In0.75Al0.25As quantum wells -: art. no. 245324 [J].
Desrat, W ;
Giazotto, F ;
Pellegrini, V ;
Beltram, F ;
Capotondi, F ;
Biasiol, G ;
Sorba, L ;
Maude, DK .
PHYSICAL REVIEW B, 2004, 69 (24) :245324-1
[7]   Defects, surface roughening, and anisotropy on the tensile InxGa1-xAs/InP(001) system [J].
Dieguez, A ;
Vila, A ;
Cornet, A ;
Clark, SA ;
Westwood, DI ;
Morante, JR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (03) :687-695
[8]   ELECTRON-SPIN RESONANCE OF THE TWO-DIMENSIONAL ELECTRON-GAS IN GA0.47IN0.53AS-INP HETEROSTRUCTURES [J].
DOBERS, M ;
VIEREN, JP ;
GULDNER, Y ;
BOVE, P ;
OMNES, F ;
RAZEGHI, M .
PHYSICAL REVIEW B, 1989, 40 (11) :8075-8078
[9]   ON THE MECHANISMS OF STRAIN RELEASE IN MOLECULAR-BEAM-EPITAXY-GROWN INXGA1-XAS/GAAS SINGLE HETEROSTRUCTURES [J].
DRIGO, AV ;
AYDINLI, A ;
CARNERA, A ;
GENOVA, F ;
RIGO, C ;
FERRARI, C ;
FRANZOSI, P ;
SALVIATI, G .
JOURNAL OF APPLIED PHYSICS, 1989, 66 (05) :1975-1983
[10]   PLASTIC RELAXATION OF METAMORPHIC SINGLE-LAYER AND MULTILAYER INGAAS/GAAS STRUCTURES [J].
DUNSTAN, DJ ;
KIDD, P ;
FEWSTER, PF ;
ANDREW, NL ;
GREY, R ;
DAVID, JPR ;
GONZALEZ, L ;
GONZALEZ, Y ;
SACEDON, A ;
GONZALEZSANZ, F .
APPLIED PHYSICS LETTERS, 1994, 65 (07) :839-841