Seeded growth of bulk AlN crystals and grain evolution in polycrystalline AlN boules

被引:35
作者
Noveski, V
Schlesser, R
Raghothamachar, B
Dudley, M
Mahajan, S
Beaudoin, S
Sitar, Z
机构
[1] N Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA
[2] Arizona State Univ, Dept Chem & Mat Engn, Tempe, AZ 85287 USA
[3] SUNY Stony Brook, Dept Mat Sci & Engn, Stony Brook, NY 11794 USA
[4] Purdue Univ, Sch Chem Engn, W Lafayette, IN 47907 USA
关键词
bulk AlN; single crystal; seeded growth; sublimation growth;
D O I
10.1016/j.jcrysgro.2004.12.027
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Large AIN crystals were grown by powder sublimation in a nitrogen atmosphere at low supersaturation and growth rates of 0.1-0.3 mm/h. The starting deposition surface was a sintered TaC disc. An appropriate adjustment of the system pressure and source-seed temperature gradient during the early stages of growth allowed epitaxial re-growth on AIN seeds that had been exposed to air. Single-crystalline AIN grains of I cm in size were achieved through multiple sublimation growth runs conducted at P = 500 Torr and growth temperatures of 2050-2150 degrees C. Elemental analysis of impurities in the grown AIN boules confirmed low oxygen contamination levels of similar to 10(19)/cm(3). No discontinuities were introduced in the structural defect distribution in the individual single-crystalline grains by the multiple re-growth steps. Absence of preferred growth directions of grains suggest the epitaxial re-growth process is suitable for seeded single-crystal growth in any orientation. (c) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:13 / 19
页数:7
相关论文
共 11 条
[1]  
BICKERMAN M, IN PRESS PHYS STAT A
[2]  
Noveski V, 2004, MRS INTERNET J N S R, V9
[3]   Mass transfer in A1N crystal growth at high temperatures [J].
Noveski, V ;
Schlesser, R ;
Mahajan, S ;
Beaudoin, S ;
Sitar, Z .
JOURNAL OF CRYSTAL GROWTH, 2004, 264 (1-3) :369-378
[4]  
Rojo JC, 2001, J CRYST GROWTH, V231, P317, DOI 10.1016/S0022-0248(01)01452-X
[5]  
ROJO JC, 2001, MAT RES S, V639
[6]   Seeded growth of AlN bulk single crystals by sublimation [J].
Schlesser, R ;
Dalmau, R ;
Sitar, Z .
JOURNAL OF CRYSTAL GROWTH, 2002, 241 (04) :416-420
[7]  
SCHLESSER R, 2001, MAT RES S P, V693
[8]  
SINGH NB, IN PRESS J CRYSTAL G
[9]   Some effects of oxygen impurities on AlN and GaN [J].
Slack, GA ;
Schowalter, LJ ;
Morelli, D ;
Freitas, JA .
JOURNAL OF CRYSTAL GROWTH, 2002, 246 (3-4) :287-298
[10]   GAN, AIN, AND INN - A REVIEW [J].
STRITE, S ;
MORKOC, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (04) :1237-1266