Seeded growth of bulk AlN crystals and grain evolution in polycrystalline AlN boules

被引:34
作者
Noveski, V
Schlesser, R
Raghothamachar, B
Dudley, M
Mahajan, S
Beaudoin, S
Sitar, Z
机构
[1] N Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA
[2] Arizona State Univ, Dept Chem & Mat Engn, Tempe, AZ 85287 USA
[3] SUNY Stony Brook, Dept Mat Sci & Engn, Stony Brook, NY 11794 USA
[4] Purdue Univ, Sch Chem Engn, W Lafayette, IN 47907 USA
关键词
bulk AlN; single crystal; seeded growth; sublimation growth;
D O I
10.1016/j.jcrysgro.2004.12.027
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Large AIN crystals were grown by powder sublimation in a nitrogen atmosphere at low supersaturation and growth rates of 0.1-0.3 mm/h. The starting deposition surface was a sintered TaC disc. An appropriate adjustment of the system pressure and source-seed temperature gradient during the early stages of growth allowed epitaxial re-growth on AIN seeds that had been exposed to air. Single-crystalline AIN grains of I cm in size were achieved through multiple sublimation growth runs conducted at P = 500 Torr and growth temperatures of 2050-2150 degrees C. Elemental analysis of impurities in the grown AIN boules confirmed low oxygen contamination levels of similar to 10(19)/cm(3). No discontinuities were introduced in the structural defect distribution in the individual single-crystalline grains by the multiple re-growth steps. Absence of preferred growth directions of grains suggest the epitaxial re-growth process is suitable for seeded single-crystal growth in any orientation. (c) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:13 / 19
页数:7
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