Characterization of layered structures by photoacoustic piezoelectric technique

被引：5

作者：

Shendeleva, ML ^{[1
]}

机构：

[1] Ukrainian Acad Sci, Inst Phys, UA-252650 Kiev, Ukraine

来源：

INTERNATIONAL CONFERENCE ON OPTICAL DIAGNOSIS OF MATERIALS AND DEVICES FOR OPTO-, MICRO-, AND QUANTUM ELECTRONICS 1997 | 1998年 / 3359卷

关键词：

photoacoustics; thermal waves; thermal diffusivity; thermoelasticity; thermoelastic strains; layered wafer; piezoelectric detection;

D O I：

10.1117/12.306266

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A thermoelastic response that arises in a two-layered wafer under its heating by periodically modulated light beam has been studied theoretically. For the case of piezoelectric detection of the signal an analytical expression for the output voltage of the transducer has been obtained which allows to calculate the amplitude and phase characteristics versus modulation frequency. It is shown that these characteristics vary strongly depending on thermal and elastic properties of both layers.

引用

页码：484 / 489

页数：6