Fabrication of Metallic Far-Infrared Filters

被引：0

作者：

Payne, Jared E. ^{[1
]}

Eddy, Joseph ^{[1
]}

Stevenson, Hunter R. J. ^{[1
]}

Ferguson, Brad ^{[1
]}

Beazer, Ryan T. ^{[1
]}

Nielson, Gregory N. ^{[2
]}

Schultz, Stephen M. ^{[1
]}

机构：

[1] Brigham Young Univ, Elect & Comp Engn, Provo, UT 84602 USA

[2] Nielson Sci, Lehi, UT USA

来源：

2022 INTERMOUNTAIN ENGINEERING, TECHNOLOGY AND COMPUTING (IETC) | 2022年

基金：

美国国家科学基金会;

关键词：

infrared filter; background radiation; ablation;

D O I：

10.1109/IETC54973.2022.9796902

中图分类号：

TP39 [计算机的应用];

学科分类号：

081203 ; 0835 ;

摘要：

A far-infrared filter is fabricated by creating metallic squares on a dielectric substrate. This capacitive metallic filter is fabricated using direct write laser ablation consisting of a femtosecond laser in combination with a high numerical aperture objective. A representative capacitive filter is fabricated on soda-lime glass substrate with a period of 100 mu m and separation width of 30 mu m. A partial capacitive filter was also fabricated on a thin film polyethylene substrate with similar dimensions.

引用

页数：5