High-quality slot waveguide ring resonator based on atomic layer deposition

被引：0
作者：
Autere, A. [1 ]
Karvonen, L. [1 ]
Saynatjoki, A. [1 ]
Roussey, M. [2 ]
Farm, E. [3 ]
Kemell, M. [3 ]
Tu, X. [4 ]
Liow, T. Y. [4 ]
Lo, G. Q. [4 ]
Ritala, M. [3 ]
Leskela, M. [3 ]
Honkanen, S. [2 ]
Sun, Z. [1 ]
机构：
[1] Aalto Univ, Sch Elect Engn, Dept Micro & Nanosci, FI-00076 Aalto, Finland
[2] Univ Eastern Finland, Inst Photon, FI-80101 Joensuu, Finland
[3] Univ Helsinki, Dept Chem, FI-00014 Helsinki, Finland
[4] ASTAR, Inst Microelect, Singapore 117685, Singapore
来源：
SILICON PHOTONICS X | 2015年 / 9367卷
关键词：
slot waveguide; ring resonator; atomic layer deposition;
D O I：
10.1117/12.2076903
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Slot waveguide based ring resonators filled with atomic layer deposited (ALD) aluminum oxide (Al 2 O 3) were fabricated and characterized. Our results demonstrate that ALD can be used to create slot waveguide ring resonators with relatively high Q-factors, which opens new possibilities for various photonic applications, such as optical sensing and all-optical signal processing.
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页数：7
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