Ammonia Gas-Sensing Characteristics of Pd Doped-WO3

被引：8
作者：
Yoon, Jin-Ho [1 ]
Lee, Hoi-Jung [1 ]
Kim, Jung-Sik [1 ]
机构：
[1] Univ Seoul, Dept Mat Sci & Engn, Seoul 130743, South Korea
来源：
SENSOR LETTERS | 2011年 / 9卷 / 01期
关键词：
Gas Sensor; Sol-Gel; Ammonia; Tungsten Trioxide; Palladium; WO3; THIN-FILMS; SENSOR RESPONSE; FABRICATION;
D O I：
10.1166/sl.2011.1416
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
The micro gas sensor for ammonia gas was fabricated by using a MEMS technology and a sol gel process and its sensing properties were investigated. Palladium doped tungsten trioxide as a sensing material was synthesized by a sol-gel method. Synthesized particles of Pd doped-WO3 were characterized with an average particle size of about 100 nm by FE-SEM images. The sensing material was coated on the micro platform and annealed at 400 degrees C. The maximum gas sensitivity was -54% at 350 degrees C for 5.0 ppm-NH3. The gas sensitivity showed a linear behavior with increasing NH3 concentration.
引用
收藏
页码：46 / 50
页数：5
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