Accurate multilayer period determination with laser-plasma water-window reflectometer

被引：1
|
作者：
Johansson, GA [1 ]
Berglund, M [1 ]
Eriksson, F [1 ]
Birch, J [1 ]
Hertz, HM [1 ]
机构：
[1] Royal Inst Technol, SE-10044 Stockholm, Sweden
来源：
ADVANCES IN LABORATORY-BASED X-RAY SOURCES AND OPTICS | 2000年 / 4144卷
关键词：
soft x-ray; multilayer mirror; W/B4C; water-window; laser-plasma; line-emission; reflectometer; reflectivity; x-ray microscopy;
D O I：
10.1117/12.405907
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
This paper describes a new method for improved determination of multilayer period using a soft x-ray reflectometer based on a line-emitting high-brightness water-window liquid-jet laser-plasma source. The use of line emission with well-known wavelengths allows accurate measurements of multilayer period without source monochromatization and calibration. By using a new multi-line data analysis procedure the multilayer period of W/B4C mirrors can be determined with an accuracy of 0.001 nm.
引用
收藏
页码：82 / 85
页数：4
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