Surface-acoustic-wave delay line at 24 GHz using the guided Rayleigh mode in AlN/SiC structures

被引：10

作者：

Takagaki, Y ^{[1
]}

Brandt, O ^{[1
]}

Ploog, KH ^{[1
]}

机构：

[1] Paul Drude Inst Solid State Elect, D-10117 Berlin, Germany

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2003年 / 42卷 / 4A期

关键词：

surface acoustic wave; aluminum nitride; silicon carbide; Rayleigh mode; superhigh frequency; interdigital transducer;

D O I：

10.1143/JJAP.42.1594

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The propagation of a surface acoustic wave (SAW) between interdigital transducers is demonstrated at a frequency of similar to24 GHz. The elevated-order guided Rayleigh. modes in AlN/SiC(0001) structures have a velocity as high as that of the transverse bulk sound wave in SiC with a polarization parallel to the c-axis. The significantly high frequency is accomplished at the SAW wavelength of 300 nm by adjusting the overlayer thickness to be about the threshold thickness for the second-order Rayleigh mode in order to maximally benefit from the SAW velocity.

引用

页码：1594 / 1595

页数：2

共 6 条

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