Nanoimaging with a compact extreme-ultraviolet laser

被引：62

作者：

Vaschenko, G

Brizuela, F

Brewer, C

Grisham, M

Mancini, H

Menoni, CS

Marconi, MC

Rocca, JJ

Chao, W

Liddle, JA

Anderson, EH

Attwood, DT

Vinogradov, AV

Artioukov, IA

Pershyn, YP

Kondratenko, VV

机构：

[1] Colorado State Univ, Dept Elect & Comp Engn, Ft Collins, CO 80523 USA

[2] Univ Navarra, Dept Phys & Appl Math, E-31080 Pamplona, Spain

[3] Lawrence Berkeley Lab, Natl Sci Fdn Engn Res Ctr Extreme Ultraviolet Sci, Berkeley, CA 94720 USA

[4] Lawrence Berkeley Lab, Ctr Xray Opt, Berkeley, CA 94720 USA

[5] PN Lebedev Phys Inst, Moscow 119991, Russia

[6] Natl Tech Univ KhPI, Dept Met & Semicond Phys, Kharkov, Ukraine

来源：

OPTICS LETTERS | 2005年 / 30卷 / 16期

关键词：

D O I：

10.1364/OL.30.002095

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

I mages with a spatial resolution of 120-150 nm were obtained with 46.9 nm light from a compact capillary-discharge laser by use of the combination of a Sc-Si multilayer-coated Schwarzschild condenser and a freestanding imaging zone plate. The results are relevant to the development of compact extreme-ultraviolet laser-based imaging tools for nanoscience and nanotechnology. (c) 2005 Optical Society of America.

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页码：2095 / 2097

页数：3

相关论文

共 16 条

[1] Nanofabrication and diffractive optics for high-resolution x-ray applications [J].

Anderson, EH ;

Olynick, DL ;

Harteneck, B ;

Veklerov, E ;

Denbeaux, G ;

Chao, WL ;

Lucero, A ;

Johnson, L ;

Attwood, D .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (06) :2970-2975

[2] Schwarzschild soft-x-ray microscope for imaging of nonradiating objects [J].

Artioukov, IA ;

Vinogradov, AV ;

Asadchikov, VE ;

Kasyanov, YS ;

Serov, RV ;

Fedorenko, AI ;

Kondratenko, VV ;

Yulin, SA .

OPTICS LETTERS, 1995, 20 (24) :2451-2453

[3] Demonstration of a high average power tabletop soft X-ray laser [J].

Benware, BR ;

Macchietto, CD ;

Moreno, CH ;

Rocca, JJ .

PHYSICAL REVIEW LETTERS, 1998, 81 (26) :5804-5807

[4]

Born M., 1999, principles of optics, V461, P401

[5] Soft 20-nm resolution x-ray microscopy demonstrated by use of multilayer test structures [J].

Chao, WL ;

Anderson, E ;

Denbeaux, GP ;

Harteneck, B ;

Liddle, JA ;

Olynick, DL ;

Pearson, AL ;

Salmassi, F ;

Song, CY ;

Attwood, DT .

OPTICS LETTERS, 2003, 28 (21) :2019-2021

[6] DEMONSTRATION OF X-RAY MICROSCOPY WITH AN X-RAY LASER OPERATING NEAR THE CARBON K EDGE [J].

DASILVA, LB ;

TREBES, JE ;

MROWKA, S ;

BARBEE, TW ;

BRASE, J ;

KOCH, JA ;

LONDON, RA ;

MACGOWAN, BJ ;

MATTHEWS, DL ;

MINYARD, D ;

STONE, G ;

YORKEY, T ;

ANDERSON, E ;

ATTWOOD, DT ;

KERN, D .

OPTICS LETTERS, 1992, 17 (10) :754-756

[7] 1ST STAGE IN THE DEVELOPMENT OF A SOFT-X-RAY REFLECTION IMAGING MICROSCOPE IN THE SCHWARZSCHILD CONFIGURATION USING A SOFT-X-RAY LASER AT 18.2 NM [J].

DICICCO, DS ;

KIM, D ;

ROSSER, R ;

SUCKEWER, S .

OPTICS LETTERS, 1992, 17 (02) :157-159

[8] Design and performance of a laser-plasma-based compact soft x-ray microscope [J].

Johansson, GA ;

Holmberg, A ;

Hertz, HM ;

Berglund, M .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2002, 73 (03) :1193-1197

[9]

LIBERTUN AR, 2004, OSA TRENDS OPTICS PH, V96

[10]

Liu Y, 2001, PHYS REV A, V63, DOI 10.1103/PhysRevA.63.033802