Deposition mechanism of diamond-like carbon and cubic boron nitride

被引：6
作者：
Robertson, J [1 ]
机构：
[1] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England
来源：
RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1997年 / 142卷 / 1-4期
关键词：
diamond-like carbon; cubic boron nitride; ion beam processing; ion-solid interactions; low energy ions;
D O I：
10.1080/10420159708211597
中图分类号：
TL [原子能技术]; O571 [原子核物理学];
学科分类号：
0827 ; 082701 ;
摘要：
Diamond-like carbon and cubic boron nitride are formed by low energy ion beam deposition. The growth mechanism involves the subplantation of ions into subsurface sites where they provide a quenched-in increase in density and sp(3) bonding. Modelling requires a simulation of critical aspects of ion-solid interactions in low atomic number solids, such as the surface penetration by ions, and defect migration in the cascade or thermal spike.
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页码：63 / 90
页数：28
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