Fluorine-doped zinc oxide transparent and conducting electrode by chemical spray synthesis

被引：37

作者：

Pawar, B. N. ^{[1
]}

Ham, Duk-Ho ^{[1
]}

Mane, R. S. ^{[1
]}

Ganesh, T. ^{[1
]}

Cho, Byung-Won ^{[2
]}

Han, Sung-Hwan ^{[1
]}

机构：

[1] Hanyang Univ, Inorgan Nano Mat Lab, Dept Chem, Seoul 133791, South Korea

[2] Korea Adv Inst Sci & Technol, Battery Res Ctr, Seoul 130650, South Korea

来源：

APPLIED SURFACE SCIENCE | 2008年 / 254卷 / 20期

关键词：

chemical spray; structural and optical properties; metal oxides;

D O I：

10.1016/j.apsusc.2008.02.088

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Highly transparent and conducting fluorine-doped zinc oxide thin films, consisting of spherical nanometer-sized grains, were synthesized onto soda-lime glass substrate by using a chemical spray unit. The effect of fluorine doping concentration in starting solution was investigated. Both doped and undoped films were preferentially oriented along [002] direction. Electrical resistivity decreases from 5.7 x 10(-2) to 8.6 x 10(-3) ohm-cm after 1 at.% fluorine doping, and increases for higher doping concentration. However, surface morphology of films obtained at 3 at.% fluorine doping appeared smooth and uniform. A shift of the edge of the optical transmission in the ultraviolet region as a result of fluorine doping was obtained. (c) 2008 Elsevier B.V. All rights reserved.

引用

页码：6294 / 6297

页数：4

共 33 条

[1] Effect of tin incorporation on physicochemical properties of ZnO films prepared by spray pyrolysis [J].

Bougrine, A ;

Addou, M ;

Kachouane, A ;

Bérnède, JC ;

Morsli, M .

MATERIALS CHEMISTRY AND PHYSICS, 2005, 91 (2-3) :247-252

[2] Influence of annealing temperature on the properties of ZnO thin films deposited by thermal evaporation [J].

Bouhssira, N. ;

Abed, S. ;

Tomasella, E. ;

Cellier, J. ;

Mosbah, A. ;

Aida, M. S. ;

Jacquet, M. .

APPLIED SURFACE SCIENCE, 2006, 252 (15) :5594-5597

[3] Influence of substrate temperature and post-treatment on the properties of ZnO:Al thin films prepared by pulsed laser deposition [J].

Chen, X ;

Guan, WJ ;

Fang, GJ ;

Zhao, XZ .

APPLIED SURFACE SCIENCE, 2005, 252 (05) :1561-1567

[4] Electrical, optical and structural properties of transparent and conducting ZnO thin films doped with Al and F by rf magnetron sputter [J].

Choi, BG ;

Kim, IH ;

Kim, DH ;

Lee, KS ;

Lee, TS ;

Cheong, B ;

Baik, YJ ;

Kim, WM .

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2005, 25 (12) :2161-2165

[5]

DUS R, 2005, SOLAR ENERGY MAT SOL, V86, P207

[6] Effect of antimony oxide stoichiometry on the nonlinearity of zinc oxide varistor ceramics [J].

Ezhilvalavan, S ;

Kutty, TRN .

MATERIALS CHEMISTRY AND PHYSICS, 1997, 49 (03) :258-269

[7] Fabrication and characterization of transparent conductive ZnO:Al thin films prepared by direct current magnetron sputtering with highly conductive ZnO(ZnAl2O4) ceramic target [J].

Fang, GJ ;

Li, DJ ;

Yao, BL .

JOURNAL OF CRYSTAL GROWTH, 2003, 247 (3-4) :393-400

[8] Properties of Al-doped ZnO thin films deposited by a chemical spray process [J].

Gomez, H. ;

Maldonado, A. ;

Castanedo-Perez, R. ;

Torres-Delgado, G. ;

Olvera, M. de la L. .

MATERIALS CHARACTERIZATION, 2007, 58 (8-9) :708-714

[9] Criteria for choosing transparent conductors [J].

Gordon, RG .

MRS BULLETIN, 2000, 25 (08) :52-57

[10] Transparent conductors as solar energy materials: A panoramic review [J].

Granqvist, Claes G. .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2007, 91 (17) :1529-1598

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