High performance hydrogen sensor based on Pd/TiO2 composite film

被引：45
作者：
Mao, Sheng [1 ]
Zhou, Han [1 ]
Wu, Shuanghong [1 ]
Yang, Junjie [1 ]
Li, Zhongyuan [1 ]
Wei, Xiongbang [1 ]
Wang, Xiangru [1 ]
Wang, Zhiyong [1 ]
Li, Jie [2 ]
机构：
[1] Univ Elect Sci & Technol China, Sch Optoelect Sci & Engn, Chengdu 610054, Sichuan, Peoples R China
[2] Chengdu Univ Informat Technol, Coll Optoelect Technol, Chengdu 610225, Sichuan, Peoples R China
来源：
INTERNATIONAL JOURNAL OF HYDROGEN ENERGY | 2018年 / 43卷 / 50期
基金：
中国国家自然科学基金;
关键词：
AAO; Hydrogen sensor; Pd; TIO2; THIN-FILMS; FAST-RESPONSE; GAS SENSORS; PD; HYBRID; NANOPARTICLES;
D O I：
10.1016/j.ijhydene.2018.10.094
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Hydrogen sensors with fast response and recovery rate based on nanoporous palladium (Pd) and titanium dioxide (TiO2) composite films supported by anodic aluminum oxide (AAO) template have been demonstrated. Nanoporous TiO2 film was sprayed on the porous AAO templates, followed by Pd film deposited on TiO2 layer by DC magnetron sputtering. We have researched the detection performance of the hydrogen sensors depending on different thickness of TiO2 layer from 6 to 30 nm with keeping the thickness of Pd as 30 nm. The results have demonstrated the sensors with 10 nm thickness of TiO2 achieve the best performance with a response/recovery time as short as 4/8s at 0.8% and 0.4% hydrogen concentration, respectively. The sensors exhibited very good performance under hydrogen concentrations from 0.4% to 1.8%. (C) 2018 Hydrogen Energy Publications LLC. Published by Elsevier Ltd. All rights reserved.
引用
收藏
页码：22727 / 22732
页数：6
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