共 32 条
Preface: Micro-Nano Technology
被引:0
作者:

Tang, Fei
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机构:
Tsinghua Univ, Dept Precis Instruments, Beijing 100084, Peoples R China Tsinghua Univ, Dept Precis Instruments, Beijing 100084, Peoples R China

Xie, Sishen
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机构:
Chinese Acad Sci, Inst Phys, Beijing 100080, Peoples R China Tsinghua Univ, Dept Precis Instruments, Beijing 100084, Peoples R China
机构:
[1] Tsinghua Univ, Dept Precis Instruments, Beijing 100084, Peoples R China
[2] Chinese Acad Sci, Inst Phys, Beijing 100080, Peoples R China
来源:
关键词:
D O I:
10.1063/1.4919284
中图分类号:
TB3 [工程材料学];
学科分类号:
0805 ;
080502 ;
摘要:
引用
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页数:2
相关论文
共 32 条
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Study of self-calibrating MEMS accelerometers
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Chen, Weiping
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Harbin Inst Technol, MEMS Cent Lab, Harbin 150006, Heilongjiang, Peoples R China Harbin Inst Technol, MEMS Cent Lab, Harbin 150006, Heilongjiang, Peoples R China

Li, Xiangyu
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Harbin Inst Technol, MEMS Cent Lab, Harbin 150006, Heilongjiang, Peoples R China Harbin Inst Technol, MEMS Cent Lab, Harbin 150006, Heilongjiang, Peoples R China

Liu, Xiaowei
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Harbin Inst Technol, MEMS Cent Lab, Harbin 150006, Heilongjiang, Peoples R China Harbin Inst Technol, MEMS Cent Lab, Harbin 150006, Heilongjiang, Peoples R China

Yin, Liang
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Harbin Inst Technol, MEMS Cent Lab, Harbin 150006, Heilongjiang, Peoples R China Harbin Inst Technol, MEMS Cent Lab, Harbin 150006, Heilongjiang, Peoples R China
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Chen, Wenguo
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Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China

Wang, Yang
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Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China

Wang, Huiying
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Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China

Wang, Yan
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Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China

Ding, Guifu
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Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China

Yang, Zhuoqing
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Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China
Chongqing Univ, Natl Key Lab Fundamental Sci Micro Nano Device &, Chongqing 400044, Peoples R China Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China

Wang, Hong
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Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China

Zhao, Xiaolin
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Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China
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Cui, Yan
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Zhang, Qunying
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Dalian Univ Technol, Minist Educ, Key Lab Precis & Nontradit Machining Technol, Dalian 116024, Liaoning Prov, Peoples R China Dalian Univ Technol, Minist Educ, Key Lab Precis & Nontradit Machining Technol, Dalian 116024, Liaoning Prov, Peoples R China

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Dalian Univ Technol, Minist Educ, Key Lab Precis & Nontradit Machining Technol, Dalian 116024, Liaoning Prov, Peoples R China Dalian Univ Technol, Minist Educ, Key Lab Precis & Nontradit Machining Technol, Dalian 116024, Liaoning Prov, Peoples R China

Dong, Weijie
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Dalian Univ Technol, Sch Elect & Informat Engn, Dalian 116024, Liaoning Provin, Peoples R China Dalian Univ Technol, Minist Educ, Key Lab Precis & Nontradit Machining Technol, Dalian 116024, Liaoning Prov, Peoples R China

Gao, Shiqiao
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Beijing Inst Technol, State Key Lab Explos Sci & Technol, Beijing 100081, Beijing Provi, Peoples R China Dalian Univ Technol, Minist Educ, Key Lab Precis & Nontradit Machining Technol, Dalian 116024, Liaoning Prov, Peoples R China
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Fang, Runiu
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Peking Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China Peking Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China

Sun, Xin
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Peking Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China Peking Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China

Miao, Min
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Beijing Informat Sci & Technol Univ, Inst Informat Microsyst, Beijing 10010, Peoples R China Peking Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China

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Peking Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China
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Minzu Univ China, Sch Informat Engn, Beijing 100081, Peoples R China
Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China Minzu Univ China, Sch Informat Engn, Beijing 100081, Peoples R China

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Minzu Univ China, Sch Informat Engn, Beijing 100081, Peoples R China Minzu Univ China, Sch Informat Engn, Beijing 100081, Peoples R China

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Han, Lei
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