interactions of polymer surfaces with excimer laser irradiation provide new techniques for surface modification of polymer materials. One is physical and chemical changes on polymer surface by laser ablation, and the other is a chemical change by laser-induced photochemical reactions. This paper focused on a morphological change on polymer films after laser ablation and a chemical change of fluorocarbon polymer film. This paper shows that the morphological change in laser-induced periodic surface structures in of interest in not only basic science but also industrial applications. In addition, we report that surface modification of fluorocarbon polymer has provided a new processing to fabricate printed wiring boards for high-frequency electronics.