Design of a New Rotary Micropositioning Stage Driven by Piezoelectric Actuator

被引：0

作者：

Zhang, Hanlun ^{[1
]}

Xu, Qingsong ^{[1
]}

机构：

[1] Univ Macau, Fac Sci & Technol, Dept Electromech Engn, Macau, Peoples R China

来源：

2019 IEEE 19TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO 2019) | 2019年

关键词：

SYSTEM;

D O I：

10.1109/nano46743.2019.8993869

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the design of a new rotary micropositioning stage, which is actuated by a linear-type piezoelectric stack actuator. This structure realizes a large enough output angle by introducing lever displacement amplifiers. This work also includes innovative designs for accepting the force and displacement of PZT. Moreover, it avoids undesired displacement by adopting symmetrical structure design. The proposed design also exhibits a compact structure, which provides convenience in practical application. Finite-element analysis is conducted with simulation study to verify the performance of the presented rotary micropositioning stage.

引用

页码：188 / 192

页数：5

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