Design of a New Rotary Micropositioning Stage Driven by Piezoelectric Actuator

被引:0
|
作者
Zhang, Hanlun [1 ]
Xu, Qingsong [1 ]
机构
[1] Univ Macau, Fac Sci & Technol, Dept Electromech Engn, Macau, Peoples R China
来源
2019 IEEE 19TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO 2019) | 2019年
关键词
SYSTEM;
D O I
10.1109/nano46743.2019.8993869
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper presents the design of a new rotary micropositioning stage, which is actuated by a linear-type piezoelectric stack actuator. This structure realizes a large enough output angle by introducing lever displacement amplifiers. This work also includes innovative designs for accepting the force and displacement of PZT. Moreover, it avoids undesired displacement by adopting symmetrical structure design. The proposed design also exhibits a compact structure, which provides convenience in practical application. Finite-element analysis is conducted with simulation study to verify the performance of the presented rotary micropositioning stage.
引用
收藏
页码:188 / 192
页数:5
相关论文
共 50 条
  • [1] Design and Analysis of a New Rotary Precision Micropositioning Stage
    She, Hanyu
    Zhang, Hanlun
    Xu, Qingsong
    2016 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND BIOMIMETICS (ROBIO), 2016, : 1554 - 1557
  • [2] Design of new style inertial rotary actuator driven by piezoelectric bimorphs
    College of Mechanical Science and Engineering, Jilin University, Changchun 130025, China
    Nami Jishu yu Jingmi Gongcheng, 2008, 4 (302-306):
  • [3] Design and experimental of piezoelectric low-frequency driven rotary actuator
    Wang R.
    Tian X.-C.
    Yang Z.-G.
    Yang S.-C.
    Jilin Daxue Xuebao (Gongxueban)/Journal of Jilin University (Engineering and Technology Edition), 2020, 50 (04): : 1283 - 1287
  • [4] Piezoelectric rotary actuator driven devices and applications
    Kim, C
    Lewis, D
    Wu, CCM
    Sanday, SC
    FERROELECTRICS, 2002, 273 : 2437 - 2442
  • [5] Design and performance testing of a new type piezoelectric rotary actuator
    Yu, Yuemin
    Leng, Jinsong
    Jixie Gongcheng Xuebao/Journal of Mechanical Engineering, 2015, 51 (08): : 185 - 190
  • [6] Design and experimental research of a new type of piezoelectric rotary actuator
    Liu X.
    Liu D.
    Gao Z.
    Liu Y.
    Qiu T.
    Jixie Gongcheng Xuebao/Journal of Mechanical Engineering, 2010, 46 (01): : 169 - 174
  • [7] Experiments with a new piezoelectric rotary actuator
    Hack, T
    PROCEEDINGS OF THE 1998 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM, 1998, : 724 - 732
  • [8] Note: A novel rotary actuator driven by only one piezoelectric actuator
    Huang, Hu
    Fu, Lu
    Zhao, Hongwei
    Shi, Chengli
    Ren, Luquan
    Li, Jianping
    Qu, Han
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2013, 84 (09):
  • [9] A fast rotary soft actuator driven by piezoelectric vibration
    Xu, Cong
    Yan, Yingbo
    Liu, Siyu
    Zhu, Jun
    Liu, Yilun
    Wu, Huaping
    CHINESE SCIENCE BULLETIN-CHINESE, 2020, 65 (32): : 3585 - 3592
  • [10] New type piezoelectric stepping rotary actuator
    College of Mechanical Science and Engineering, Jilin University, Changchun 130022, China
    Jilin Daxue Xuebao (Gongxueban), 2006, 6 (898-902):