Feed-forward control of fast tool servo for real-time correction of spindle error in diamond turning of flat surfaces

A fast tool servo is designed and tested to obtain sub-micrometre form accuracy in diamond turning of flat surfaces. The thermal growth spindle error is compensated for real time using a fast tool servo driven by a piezoelectric actuator along with a capacitive displacement sensor. To overcome the inherent non-linearity of the piezoelectric actuator, Proportional Integral (PI) feedback control with a notch filter is implemented. Besides, feed-forward control based on a simple feed-forward predictor is added to achieve better tracking performance. Actual machining data are discussed in detail to prove that the proposed fast tool servo is capable of fabricating flat aluminum specimens of 100 mm in diameter to a form accuracy of 0.10 mum in peak-to-valley error value. (C) 2003 Elsevier Ltd. All rights reserved.