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Probing fatigue in ferroelectric thin films with subnanometer depth resolution
被引:10
作者:

Cao, Jiang-Li
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机构:
Univ Aachen, RWTH, Inst Phys 2 B, D-52056 Aachen, Germany Univ Aachen, RWTH, Inst Phys 2 B, D-52056 Aachen, Germany

Solbach, Axel
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h-index: 0
机构: Univ Aachen, RWTH, Inst Phys 2 B, D-52056 Aachen, Germany

Klemradt, Uwe
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h-index: 0
机构: Univ Aachen, RWTH, Inst Phys 2 B, D-52056 Aachen, Germany

Weirich, Thomas
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h-index: 0
机构: Univ Aachen, RWTH, Inst Phys 2 B, D-52056 Aachen, Germany

Mayer, Joachim
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h-index: 0
机构: Univ Aachen, RWTH, Inst Phys 2 B, D-52056 Aachen, Germany

Schorn, Peter J.
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h-index: 0
机构: Univ Aachen, RWTH, Inst Phys 2 B, D-52056 Aachen, Germany

Boettger, Ulrich
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机构: Univ Aachen, RWTH, Inst Phys 2 B, D-52056 Aachen, Germany
机构:
[1] Univ Aachen, RWTH, Inst Phys 2 B, D-52056 Aachen, Germany
[2] Univ Sci & Technol Beijing, Dept Mat Phys & Chem, Beijing 100083, Peoples R China
[3] Univ Aachen, RWTH, Inst Werkstoffe Electrotech 2, D-52056 Aachen, Germany
[4] Univ Aachen, RWTH, D-52074 Aachen, Germany
关键词:
D O I:
10.1063/1.2771534
中图分类号:
O59 [应用物理学];
学科分类号:
摘要:
The authors report the study of polarization fatigue in Pb(Zr,Ti)O-3 (PZT) ferroelectric thin films using in situ high-resolution grazing incidence x-ray specular reflectivity of synchrotron radiation. The results demonstrate that there is no formation of a region of different electron densities in the film growth direction with subnanometer depth resolution during fatigue. The upper bounds on the theoretically predicted interfacial accumulation of oxygen vacancies at the interfaces between PZT and Pt electrodes are determined by the comparison of experimental results and theoretical simulations. (C) 2007 American Institute of Physics.
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共 22 条
[1]
Effect of B-site cation stoichiometry on electrical fatigue of RuO2/Pb(ZrxTi1-x)O-3/RuO2 capacitors
[J].
AlShareef, HN
;
Tuttle, BA
;
Warren, WL
;
Headley, TJ
;
Dimos, D
;
Voigt, JA
;
Nasby, RD
.
JOURNAL OF APPLIED PHYSICS,
1996, 79 (02)
:1013-1016

AlShareef, HN
论文数: 0 引用数: 0
h-index: 0
机构: Sandia National Labortories, Albuquerque

Tuttle, BA
论文数: 0 引用数: 0
h-index: 0
机构: Sandia National Labortories, Albuquerque

Warren, WL
论文数: 0 引用数: 0
h-index: 0
机构: Sandia National Labortories, Albuquerque

Headley, TJ
论文数: 0 引用数: 0
h-index: 0
机构: Sandia National Labortories, Albuquerque

Dimos, D
论文数: 0 引用数: 0
h-index: 0
机构: Sandia National Labortories, Albuquerque

Voigt, JA
论文数: 0 引用数: 0
h-index: 0
机构: Sandia National Labortories, Albuquerque

Nasby, RD
论文数: 0 引用数: 0
h-index: 0
机构: Sandia National Labortories, Albuquerque
[2]
FERROELECTRICS FOR NONVOLATILE RAMS
[J].
BONDURANT, D
;
GNADINGER, F
.
IEEE SPECTRUM,
1989, 26 (07)
:30-33

BONDURANT, D
论文数: 0 引用数: 0
h-index: 0

GNADINGER, F
论文数: 0 引用数: 0
h-index: 0
[3]
Density inhomogeneity in ferroelectric thin films
[J].
Cao, Jiang-Li
;
Solbach, Axel
;
Klemradt, Uwe
;
Weirich, Thomas
;
Mayer, Joachim
;
Boettger, Ulrich
;
Schorn, Peter J.
;
Waser, Rainer
.
APPLIED PHYSICS LETTERS,
2006, 89 (05)

Cao, Jiang-Li
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Aachen, Rhein Westfal TH Aachen, Phys Inst 2 B, D-52056 Aachen, Germany Univ Aachen, Rhein Westfal TH Aachen, Phys Inst 2 B, D-52056 Aachen, Germany

Solbach, Axel
论文数: 0 引用数: 0
h-index: 0
机构: Univ Aachen, Rhein Westfal TH Aachen, Phys Inst 2 B, D-52056 Aachen, Germany

Klemradt, Uwe
论文数: 0 引用数: 0
h-index: 0
机构: Univ Aachen, Rhein Westfal TH Aachen, Phys Inst 2 B, D-52056 Aachen, Germany

Weirich, Thomas
论文数: 0 引用数: 0
h-index: 0
机构: Univ Aachen, Rhein Westfal TH Aachen, Phys Inst 2 B, D-52056 Aachen, Germany

Mayer, Joachim
论文数: 0 引用数: 0
h-index: 0
机构: Univ Aachen, Rhein Westfal TH Aachen, Phys Inst 2 B, D-52056 Aachen, Germany

Boettger, Ulrich
论文数: 0 引用数: 0
h-index: 0
机构: Univ Aachen, Rhein Westfal TH Aachen, Phys Inst 2 B, D-52056 Aachen, Germany

Schorn, Peter J.
论文数: 0 引用数: 0
h-index: 0
机构: Univ Aachen, Rhein Westfal TH Aachen, Phys Inst 2 B, D-52056 Aachen, Germany

Waser, Rainer
论文数: 0 引用数: 0
h-index: 0
机构: Univ Aachen, Rhein Westfal TH Aachen, Phys Inst 2 B, D-52056 Aachen, Germany
[4]
X-ray reflectivity studies of ferroelectric and dielectric multilayer structures
[J].
Cao, JL
;
Solbach, A
;
Klemradt, U
.
PHYSICA B-CONDENSED MATTER,
2005, 357 (1-2)
:122-125

Cao, JL
论文数: 0 引用数: 0
h-index: 0
机构:
Rhein Westfal TH Aachen, Phys Inst B 2, D-52074 Aachen, Germany Rhein Westfal TH Aachen, Phys Inst B 2, D-52074 Aachen, Germany

Solbach, A
论文数: 0 引用数: 0
h-index: 0
机构:
Rhein Westfal TH Aachen, Phys Inst B 2, D-52074 Aachen, Germany Rhein Westfal TH Aachen, Phys Inst B 2, D-52074 Aachen, Germany

Klemradt, U
论文数: 0 引用数: 0
h-index: 0
机构:
Rhein Westfal TH Aachen, Phys Inst B 2, D-52074 Aachen, Germany Rhein Westfal TH Aachen, Phys Inst B 2, D-52074 Aachen, Germany
[5]
Thin film and surface characterization by specular X-ray reflectivity
[J].
Chason, E
;
Mayer, TM
.
CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES,
1997, 22 (01)
:1-67

Chason, E
论文数: 0 引用数: 0
h-index: 0
机构: Sandia National Laboratories, Dept. 1112, M51415, Albuquerque

Mayer, TM
论文数: 0 引用数: 0
h-index: 0
机构: Sandia National Laboratories, Dept. 1112, M51415, Albuquerque
[6]
Discrimination between bulk and interface scenarios for the suppression of the switchable polarization (fatigue) in Pb(Zr,Ti)O3 thin films capacitors with Pt electrodes
[J].
Colla, EL
;
Taylor, DV
;
Tagantsev, AK
;
Setter, N
.
APPLIED PHYSICS LETTERS,
1998, 72 (19)
:2478-2480

Colla, EL
论文数: 0 引用数: 0
h-index: 0
机构:
Swiss Federal Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland Swiss Federal Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland

Taylor, DV
论文数: 0 引用数: 0
h-index: 0
机构:
Swiss Federal Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland Swiss Federal Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland

Tagantsev, AK
论文数: 0 引用数: 0
h-index: 0
机构:
Swiss Federal Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland Swiss Federal Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland

Setter, N
论文数: 0 引用数: 0
h-index: 0
机构:
Swiss Federal Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland Swiss Federal Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland
[7]
A model for fatigue in ferroelectric perovskite thin films
[J].
Dawber, M
;
Scott, JF
.
APPLIED PHYSICS LETTERS,
2000, 76 (08)
:1060-1062

Dawber, M
论文数: 0 引用数: 0
h-index: 0
机构: Univ Cambridge, Dept Earth Sci, Symetrix Ctr Ferr, Cambridge CB2 3EQ, England

Scott, JF
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Cambridge, Dept Earth Sci, Symetrix Ctr Ferr, Cambridge CB2 3EQ, England Univ Cambridge, Dept Earth Sci, Symetrix Ctr Ferr, Cambridge CB2 3EQ, England
[8]
Structural visualization of polarization fatigue in epitaxial ferroelectric oxide devices
[J].
Do, DH
;
Evans, PG
;
Isaacs, ED
;
Kim, DM
;
Eom, CB
;
Dufresne, EM
.
NATURE MATERIALS,
2004, 3 (06)
:365-369

Do, DH
论文数: 0 引用数: 0
h-index: 0
机构: Univ Wisconsin, Dept Mat Sci & Engn, Madison, WI 53706 USA

Evans, PG
论文数: 0 引用数: 0
h-index: 0
机构: Univ Wisconsin, Dept Mat Sci & Engn, Madison, WI 53706 USA

Isaacs, ED
论文数: 0 引用数: 0
h-index: 0
机构: Univ Wisconsin, Dept Mat Sci & Engn, Madison, WI 53706 USA

Kim, DM
论文数: 0 引用数: 0
h-index: 0
机构: Univ Wisconsin, Dept Mat Sci & Engn, Madison, WI 53706 USA

Eom, CB
论文数: 0 引用数: 0
h-index: 0
机构: Univ Wisconsin, Dept Mat Sci & Engn, Madison, WI 53706 USA

Dufresne, EM
论文数: 0 引用数: 0
h-index: 0
机构: Univ Wisconsin, Dept Mat Sci & Engn, Madison, WI 53706 USA
[9]
FERROELECTRIC PROPERTIES AND FATIGUE OF PBZR0.51TI0.49O3 THIN-FILMS OF VARYING THICKNESS - BLOCKING LAYER MODEL
[J].
LARSEN, PK
;
DORMANS, GJM
;
TAYLOR, DJ
;
VANVELDHOVEN, PJ
.
JOURNAL OF APPLIED PHYSICS,
1994, 76 (04)
:2405-2413

LARSEN, PK
论文数: 0 引用数: 0
h-index: 0
机构: Philips Research Laboratories, 5600 JA Eindhoven

DORMANS, GJM
论文数: 0 引用数: 0
h-index: 0
机构: Philips Research Laboratories, 5600 JA Eindhoven

TAYLOR, DJ
论文数: 0 引用数: 0
h-index: 0
机构: Philips Research Laboratories, 5600 JA Eindhoven

VANVELDHOVEN, PJ
论文数: 0 引用数: 0
h-index: 0
机构: Philips Research Laboratories, 5600 JA Eindhoven
[10]
Phase separation in lead zirconate titanate and bismuth titanate during electrical shorting and fatigue
[J].
Lou, XJ
;
Hu, XB
;
Zhang, M
;
Morrison, FD
;
Redfern, SAT
;
Scott, JF
.
JOURNAL OF APPLIED PHYSICS,
2006, 99 (04)

Lou, XJ
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Cambridge, Dept Earth Sci, Cambridge CB2 3EQ, England Univ Cambridge, Dept Earth Sci, Cambridge CB2 3EQ, England

Hu, XB
论文数: 0 引用数: 0
h-index: 0
机构: Univ Cambridge, Dept Earth Sci, Cambridge CB2 3EQ, England

Zhang, M
论文数: 0 引用数: 0
h-index: 0
机构: Univ Cambridge, Dept Earth Sci, Cambridge CB2 3EQ, England

Morrison, FD
论文数: 0 引用数: 0
h-index: 0
机构: Univ Cambridge, Dept Earth Sci, Cambridge CB2 3EQ, England

Redfern, SAT
论文数: 0 引用数: 0
h-index: 0
机构: Univ Cambridge, Dept Earth Sci, Cambridge CB2 3EQ, England

Scott, JF
论文数: 0 引用数: 0
h-index: 0
机构: Univ Cambridge, Dept Earth Sci, Cambridge CB2 3EQ, England