Probing fatigue in ferroelectric thin films with subnanometer depth resolution

被引:10
作者
Cao, Jiang-Li [1 ]
Solbach, Axel
Klemradt, Uwe
Weirich, Thomas
Mayer, Joachim
Schorn, Peter J.
Boettger, Ulrich
机构
[1] Univ Aachen, RWTH, Inst Phys 2 B, D-52056 Aachen, Germany
[2] Univ Sci & Technol Beijing, Dept Mat Phys & Chem, Beijing 100083, Peoples R China
[3] Univ Aachen, RWTH, Inst Werkstoffe Electrotech 2, D-52056 Aachen, Germany
[4] Univ Aachen, RWTH, D-52074 Aachen, Germany
关键词
D O I
10.1063/1.2771534
中图分类号
O59 [应用物理学];
学科分类号
摘要
The authors report the study of polarization fatigue in Pb(Zr,Ti)O-3 (PZT) ferroelectric thin films using in situ high-resolution grazing incidence x-ray specular reflectivity of synchrotron radiation. The results demonstrate that there is no formation of a region of different electron densities in the film growth direction with subnanometer depth resolution during fatigue. The upper bounds on the theoretically predicted interfacial accumulation of oxygen vacancies at the interfaces between PZT and Pt electrodes are determined by the comparison of experimental results and theoretical simulations. (C) 2007 American Institute of Physics.
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页数:3
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