Multi-layered [Au/Si3N4/SiO2] thermal actuator realization using metal passivated TMAH micro-machining

被引：2

作者：

Maharshi, Vikram ^{[1
]}

Mere, Viphretuo ^{[2
]}

Agarwal, Ajay ^{[3
]}

机构：

[1] Indian Inst Technol, Dept Elect Engn, Delhi, India

[2] Indian Inst Sci, Ctr Nano Sci & Engn, Bangalore, Karnataka, India

[3] CSIR CEERI, Smart Sensor Grp, Pilani, Rajasthan, India

来源：

ENGINEERING RESEARCH EXPRESS | 2019年 / 1卷 / 01期

关键词：

FEM; LDV; COMSOL; resonant; TMAH; MEMS; MICROMIRROR;

D O I：

10.1088/2631-8695/ab2659

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper presents the design and fabrication of thermally actuated multi-layered microactuator for out of plane actuation application. Multi-layered actuators are fabricated using ammonium persulfate based TMAH (Tetra-Methyl-Ammonium-Hydroxide) etching with metal passivation. Multi-layered [Au/Si3N4/SiO2] microactuators with straight and cross-heaters are characterized using the I-V measurement tool. Temperature across actuator was similar to simulated results. Gold as an upper layer of a microactuator fully protected during the release process. Fundamental mode or resonant frequency of fabricated multi-layered microactuator measured by laser Doppler vibrometer (LDV) which observed around 20 KHz.

引用

页数：8

共 19 条

[1] Characterization of the mechanical behavior of an electrically actuated microbeam [J].

Abdel-Rahman, EM ;

Younis, MI ;

Nayfeh, AH .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2002, 12 (06) :759-766

[2] Suitability of MEMS accelerometers for condition monitoring: An experimental study [J].

Albarbar, Alhussein ;

Mekid, Samir ;

Starr, Andrew ;

Pietruszkiewicz, Robert .

SENSORS, 2008, 8 (02) :784-799

[3]

Chowdhury S, 2000, PROCEEDINGS OF THE 43RD IEEE MIDWEST SYMPOSIUM ON CIRCUITS AND SYSTEMS, VOLS I-III, P240, DOI 10.1109/MWSCAS.2000.951629

[4] A multilayer thick-film PZT actuator for MEMs applications [J].

Harris, N. R. ;

Hill, M. ;

Torah, R. ;

Townsend, R. ;

Beeby, S. ;

White, N. M. ;

Ding, J. .

SENSORS AND ACTUATORS A-PHYSICAL, 2006, 132 (01) :311-316

[5]

Hassanzadeh A., 2009, DESIGN CONSIDERATION, DOI [10.1109/SSST.2009.4806807, DOI 10.1109/SSST.2009.4806807]

[6]

Huikai Xie, 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), P496, DOI 10.1109/MEMSYS.2000.838567

[7] An Electrothermal Tip-Tilt-Piston Micromirror Based on Folded Dual S-Shaped Bimorphs [J].

Jia, Kemiao ;

Pal, Sagnik ;

Xie, Huikai .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2009, 18 (05) :1004-1015

[8] Piezoelectric MEMS for energy harvesting [J].

Kanno, Isaku .

15TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2015), 2015, 660

[9] A novel MEMS electromagnetic actuator with large displacement [J].

Lv, Xingdong ;

Wei, Weiwei ;

Mao, Xu ;

Chen, Yu ;

Yang, Jinling ;

Yang, Fuhua .

SENSORS AND ACTUATORS A-PHYSICAL, 2015, 221 :22-28

[10] Comprehensive thermal modelling and characterization of an electro-thermal-compliant microactuator [J].

Mankame, ND ;

Ananthasuresh, GK .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2001, 11 (05) :452-462

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