High-Sensitivity Silicon Few-Mode Microring Resonators for Temperature Sensing

被引：1
|
作者：
Hu, Jinzhu [1 ]
Mao, Siqiang [1 ]
Zhang, Hanyu [2 ]
Jiang, Weifeng [1 ]
机构：
[1] Nanjing Univ Posts & Telecommun, Coll Elect & Opt Engn, Nanjing, Peoples R China
[2] Nanjing Univ Posts & Telecommun, Peter Grunberg Res Ctr, Coll Telecommun & Informat Engn, Nanjing, Peoples R China
来源：
2022 IEEE 14TH INTERNATIONAL CONFERENCE ON ADVANCED INFOCOMM TECHNOLOGY (ICAIT 2022) | 2022年
基金：
中国国家自然科学基金;
关键词：
microring resonator; silicon photonics; temperature sensing;
D O I：
10.1109/ICAIT56197.2022.9862797
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
High-sensitivity silicon few-mode microring resonators (MRRs) are proposed and designed for temperature sensing. The proposed structures consist of a single-mode bus waveguide and a multimode ring waveguide. According to the phase-matching condition, few-mode MRRs with three different radii are designed for the high-order TE1 mode operating. The large free spectral range (FSR) of 24.9 nm, 15.6 nm, and 7.76 nm are achieved at radii of 3, 5, and 10 mu m, respectively. For temperature sensing, high linear sensing sensitivity of 99 pm/k, 102 pm/k, and 100 pm/k can be obtained.
引用
收藏
页码：202 / 206
页数：5
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