Fully integrated magnetically actuated micromachined relays

被引：100
作者：
Taylor, WP [1 ]
Brand, O
Allen, MG
机构：
[1] Teledyne Relays, Hawthorne, CA 90250 USA
[2] Swiss Fed Inst Technol, Phys Elect Lab, Zurich, Switzerland
[3] Georgia Inst Technol, Sch Elect & Comp Engn, Atlanta, GA 30332 USA
来源：
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 1998年 / 7卷 / 02期
关键词：
electromagnetic; magnetic; micromachined; relay; switch;
D O I：
10.1109/84.679353
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A fully integrated magnetically actuated micromachined relay has been successfully fabricated and tested. This particular device uses a single-layer coil to actuate a movable upper magnetically responsive platform. The minimum current for actuation was 180 mA, resulting in an actuation power of 33 mW, Devices have been tested which can make and break 1.2 A of current through the relay contacts when the relay is electromagnetically switched. Operational lifetimes in excess of 850 000 operations have been observed, Contact resistances as low as 22.4 m Omega have been observed under electromagnetic actuation. Magnetic and structural finite-element (FE) simulations have been performed using ANSYS to calculate both the actuation and contact forces.
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收藏
页码：181 / 191
页数：11
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