Graphene quantum dots assisted synthesis of highconcentration nitrogen doped graphene for infrared photodetectors

被引:3
作者
Xie, Feng [1 ]
Liu, Zhiduo [2 ]
Wang, Changxing [1 ]
Chen, Da [1 ]
Zhu, Wei [1 ]
Li, Xiamen [1 ]
Guo, Qinglei [3 ,4 ]
Wang, Gang [1 ]
机构
[1] Ningbo Univ, Sch Phys Sci & Technol, Dept Microelect Sci & Engn, Ningbo 315211, Peoples R China
[2] Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
[3] Shandong Univ, Sch Microelect, Jinan 250100, Peoples R China
[4] Fudan Univ, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China
基金
中国国家自然科学基金;
关键词
Graphene quantum dots; N-doped graphene; Chemical vapor deposition; Photodetector; SINGLE-CRYSTAL GRAPHENE; LOW-TEMPERATURE GROWTH; FILMS; NUCLEATION; BUBBLES;
D O I
10.1016/j.diamond.2021.108774
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The application of graphene in the field of microelectronics is becoming more and more urgent with the emergence of bottlenecks in silicon-based semiconductor technology, and the ability of controllable doping in graphene is, therefore, strongly demanded to tune their electronic or optoelectronic properties for the fabrication of high-performance devices. Herein, through seeding zero-dimensional (0D) nitrogen doped graphene quantum dots (N-GQDs) on a catalytic substrate, the graphene monolayer with nitrogen doping is obtained via chemical vapor deposition (CVD). X-ray photoelectron spectroscopy (XPS) characterization shows the doping concentration reaches up to 32%. Experimental and theoretical investigations reveal that N-GQDs act as the nucleation sites for the epitaxial growth of doped graphene monolayers. Finally, infrared photodetector built on N doped graphene (NG) film is fabricated, accompanying with high detectivity (similar to 1.52 x 10(10) cm Hz(1/2) W-1) and responsivity (79 mA W-1) at the wavelength of 1550 nm. Our study may provide a controllable and convenient approach to achieve doped graphene, which paves the way for the application of graphene in the field of microelectronics.
引用
收藏
页数:7
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