Indium Tin Oxide Thin-Film Thermocouple Probe Based on Sapphire Microrod

被引：23

作者：

Deng, Jinjun ^{[1
]}

Zhang, Linwei ^{[1
]}

Hui, Liuan ^{[1
]}

Jin, Xinhang ^{[1
]}

Ma, Binghe ^{[1
]}

机构：

[1] Northwestern Polytech Univ, Key Lab Micro Nano Syst Aerosp, Minist Educ, Xian 710072, Peoples R China

来源：

SENSORS | 2020年 / 20卷 / 05期

基金：

中国国家自然科学基金;

关键词：

thin-film thermocouple; sapphire cylinder; indium tin oxide; sputtering;

D O I：

10.3390/s20051289

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Indium tin oxide (ITO) thin-film thermocouples monitor the temperature of hot section components in gas turbines. As an in situ measuring technology, the main challenge of a thin-film thermocouple is its installation on complex geometric surfaces. In this study, an ITO thin-film thermocouple probe based on a sapphire microrod was used to access narrow areas. The performance of the probe, i.e., the thermoelectricity and stability, was analyzed. This novel sensor resolves the installation difficulties of thin-film devices.

引用

页数：8

共 13 条

[1] THIN-FILM THERMOCOUPLES FOR ADVANCED CERAMIC GAS-TURBINE ENGINES
ANIOLEK, GE
GREGORY, OJ
[J]. SURFACE & COATINGS TECHNOLOGY, 1994, 68 : 70 - 75
[2] ENHANCED CU-TEFLON ADHESION BY PRESPUTTERING TREATMENT - EFFECT OF SURFACE-MORPHOLOGY CHANGES
CHANG, CA
[J]. APPLIED PHYSICS LETTERS, 1987, 51 (16) : 1236 - 1238
[3] Thin-Film Thermocouples Based on the System In2O3-SnO2
Chen, Ximing
Gregory, Otto J.
Amani, Matin
[J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2011, 94 (03) : 854 - 860
[4] Review of temperature measurement
Childs, PRN
Greenwood, JR
Long, CA
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2000, 71 (08) : 2959 - 2978
[5] A Through-Hole Lead Connection Method for Thin-Film Thermocouples on Turbine Blades
Deng, Jinjun
Wang, Weihua
Hui, Liuan
Zhang, Jietong
Jin, Xinhang
[J]. SENSORS, 2019, 19 (05)
[6] A novel surface-integrated spray-on thermocouple for heat transfer measurements
Forster, Felix J.
Brack, Stefan
Poser, Rico
von Wolfersdorf, Jens
Weigand, Bernhard
[J]. EXPERIMENTAL THERMAL AND FLUID SCIENCE, 2018, 93 : 356 - 365
[7] A Highly Thermostable In2O3/ITO Thin Film Thermocouple Prepared via Screen Printing for High Temperature Measurements
Liu, Yantao
Ren, Wei
Shi, Peng
Liu, Dan
Zhang, Yijun
Liu, Ming
Ye, Zuo-Guang
Jing, Weixuan
Tian, Bian
Jiang, Zhuangde
[J]. SENSORS, 2018, 18 (04)
[8] A fast response thermocouple for internal combustion engine surface temperature measurements
Marr, Michael A.
Wallace, James S.
Chandra, Sanjeev
Pershin, Larry
Mostaghimi, Javad
[J]. EXPERIMENTAL THERMAL AND FLUID SCIENCE, 2010, 34 (02) : 183 - 189
[9] Elaboration, characterization and dielectric properties study of amorphous alumina thin films deposited by r.f. magnetron sputtering
Segda, BG
Jacquet, M
Besse, JP
[J]. VACUUM, 2001, 62 (01) : 27 - 38
[10] Metallic and Ceramic Thin Film Thermocouples for Gas Turbine Engines
Tougas, Ian M.
Amani, Matin
Gregory, Otto J.
[J]. SENSORS, 2013, 13 (11) : 15324 - 15347

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