Indium Tin Oxide Thin-Film Thermocouple Probe Based on Sapphire Microrod

被引：24

作者：

Deng, Jinjun ^{[1
]}

Zhang, Linwei ^{[1
]}

Hui, Liuan ^{[1
]}

Jin, Xinhang ^{[1
]}

Ma, Binghe ^{[1
]}

机构：

[1] Northwestern Polytech Univ, Key Lab Micro Nano Syst Aerosp, Minist Educ, Xian 710072, Peoples R China

来源：

SENSORS | 2020年 / 20卷 / 05期

基金：

中国国家自然科学基金;

关键词：

thin-film thermocouple; sapphire cylinder; indium tin oxide; sputtering;

D O I：

10.3390/s20051289

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Indium tin oxide (ITO) thin-film thermocouples monitor the temperature of hot section components in gas turbines. As an in situ measuring technology, the main challenge of a thin-film thermocouple is its installation on complex geometric surfaces. In this study, an ITO thin-film thermocouple probe based on a sapphire microrod was used to access narrow areas. The performance of the probe, i.e., the thermoelectricity and stability, was analyzed. This novel sensor resolves the installation difficulties of thin-film devices.

引用

页数：8

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