Design and fabrication of a microfluid angular rate sensor

This paper reports on the design, analysis and fabrication of a novel micromachined angular rate sensor, the operating principle of which is based on the hot-wire anemometer and jet pump theory, and the sensor can be fabricated on silicon substrate using MEMS(micro-electro-mechanical-systems) technology. The use of circulating airflow to detect angular rate makes the device free from suspended moving components such as solid proof mass, and consequently anti-overloads. The paper gives a detailed analysis of the working mechanism, and simulation is carried out using finite element analysis method. During the simulation, ANSYS is employed.