Miniaturized piezo-actuated adaptive prism for biaxial optical scanning

被引：0

作者：

Lemke, Florian ^{[1
]}

Weber, Pascal M. ^{[1
]}

Wallrabe, Ulrike ^{[1
]}

Wapler, Matthias C. ^{[1
]}

机构：

[1] Univ Freiberg, Dept Microsyst Engn, IMTEK, Freiburg, Germany

来源：

2019 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) | 2019年

关键词：

adaptive prism; biaxial optical scanning; piezo actuation; transmissive optical device;

D O I：

10.1109/omn.2019.8925071

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a biaxial adaptive prism that allows for a simplified light path compared to scanning mirrors. Using three piezo bimorph actuators with stepless control, we actively tilt a fluid-glass interface, achieving scan angles up to 8.5 degrees with response fines down to 5.5 ms. The compact and optimized design has an outer diameter of 33 mm for a 7 mm aperture.

引用

页码：222 / 223

页数：2

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