Power efficient V-shape electro-thermal actuator using constrained su-8

This paper presents the design, simulation and characterization of V-shape thermal actuator, which incorporates silicon/SU-8 composite. The design exploits the confined SU-8 layers in the composite for effective thermal actuation. The micro-fabricated actuator (1000-mu m long, 56-mu m wide, 60-mu m high, 15 degrees bent) demonstrates a large in-plane motion (10 pm) at a 1.75-V driving voltage, consuming low power (16 mW) and operating at a relatively low temperature (125 degrees C). It is estimated to produce a blocked apex force of 100 mN at 1.75 V.